Method for manufacturing semiconductor device

ABSTRACT

To provide a method by which a semiconductor device including a thin film transistor with excellent electric characteristics and high reliability is manufactured with a small number of steps. After a channel protective layer is formed over an oxide semiconductor film containing In, Ga, and Zn, a film having n-type conductivity and a conductive film are formed, and a resist mask is formed over the conductive film. The conductive film, the film having n-type conductivity, and the oxide semiconductor film containing In, Ga, and Zn are etched using the channel protective layer and gate insulating films as etching stoppers with the resist mask, so that source and drain electrode layers, a buffer layer, and a semiconductor layer are formed.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device having a circuitincluding a thin film transistor (hereinafter referred to as a TFT)using an oxide semiconductor film for a channel formation region and amethod for manufacturing the semiconductor device. For example, thepresent invention relates to an electronic appliance mounted with anelectro-optic device typified by a liquid crystal display panel or alight-emitting display device having an organic light-emitting elementas a component.

Note that the semiconductor devices in this specification refer to allthe devices which can operate by using semiconductor characteristics,and an electro-optic device, a semiconductor circuit, and an electronicappliance are all included in the semiconductor devices.

2. Description of the Related Art

In recent years, active matrix display devices (such as liquid crystaldisplay devices, light-emitting display devices, and electrophoreticdisplay devices) in each of which a switching element including a thinfilm transistor (TFT) is provided in each of display pixels arranged inmatrix have been actively developed. An active matrix display device isadvantageous because a switching element is provided in each pixel (oreach dot) and thus lower voltage driving is possible as compared to apassive matrix display device in the case where pixel density isincreased.

In addition, a technique applied to an electronic device or an opticaldevice, in which a thin film transistor (TFT) or the like is formedusing an oxide semiconductor film for a channel formation region, hasattracted attention. As an oxide semiconductor film, a TFT using ZnO anda TFT using InGaO₃(ZnO)_(m) are given for example. Patent Documents 1and 2 and the like disclose a technique applied to a switching elementor the like of an image display device, in which a TFT formed using suchan oxide semiconductor film is formed over a substrate having alight-transmitting property.

CITATION LIST

[Patent Document 1] Japanese Published Patent Application No.2007-123861.

[Patent Document 2] Japanese Published Patent Application No.2007-96055.

SUMMARY OF THE INVENTION

A thin film transistor using an oxide semiconductor film for a channelformation region is required to operate rapidly, be manufactured througha relatively simple process, and be sufficiently reliable.

In forming a thin film transistor, a metal material having lowresistance is used for source and drain electrode layers. In particular,in the case of manufacturing display devices performing large-areadisplay, the problem of signal delay due to wiring resistance becomessignificant. Therefore, a metal material having low electric resistanceis desirably used as a material of a wiring or an electrode. In the caseof the thin film transistor structure in which an oxide semiconductorfilm is directly in contact with source and drain electrode layersformed using a metal material having low electric resistance, contactresistance might be high. As one of factors causing high contactresistance, the following condition is given: Schottky junction isformed at the interface between the oxide semiconductor film and thesource and drain electrode layers.

In addition, capacitance is caused in a portion where the oxidesemiconductor film and the source and drain electrode layers aredirectly in contact with each other, and frequency characteristics(referred to as f characteristics) are low, which might hinder rapidoperation of the thin film transistor.

Further, the oxide semiconductor film is susceptible to damage such asreduction in film thickness by an etchant or change in an amount ofoxygen vacancy by plasma. If the damaged semiconductor layer is used fora thin film transistor, characteristics vary. Thus, in the case where aninverted staggered thin film transistor using an oxide semiconductorfilm is manufactured, a structure in which a channel protective layerprotecting a channel formation region from damage is effective. However,in accordance with formation of the channel protective layer, the numberof photomasks that are used is increased, a process becomes complicated,and productivity may be decreased.

It is an object of the present invention to provide a method formanufacturing a thin film transistor in which contact resistance betweenan oxide semiconductor layer containing indium (In), gallium (Ga), andzinc (Zn) and source and drain electrode layers is small and in whichthe oxide semiconductor layer is less damaged in a manufacturing processof the thin film transistor, with a small number of steps.

The summary of the present invention is that a method for manufacturingan inverted-staggered (bottom-gate) thin film transistor is included inwhich an oxide semiconductor layer containing In, Ga, and Zn is used, abuffer layer is provided between the semiconductor layer and source anddrain electrode layers, and a channel protective layer is provided.

In this specification, a semiconductor layer formed using an oxidesemiconductor film containing In, Ga, and Zn is also referred to as an“IGZO semiconductor layer”.

An ohmic contact of a source electrode and an IGZO semiconductor layeris necessary and the contact resistance therebetween is desirably as lowas possible. Similarly, an ohmic contact of a drain electrode and theIGZO semiconductor layer is necessary and the contact resistancetherebetween is desirably as low as possible.

Therefore, an ohmic contact is formed by intentionally providing abuffer layer having a higher carrier concentration than the IGZOsemiconductor layer between the source electrode and the IGZOsemiconductor layer.

Further, since a structure of a thin film transistor to which anembodiment of the present invention is applied is provided with achannel protective layer, not only a channel formation region but also aregion opposite to a surface which is in contact with a gate insulatingfilm of an IGZO semiconductor layer, i.e., a back channel can beprotected from damage in a process (such as reduction in film thicknessby plasma or an etchant in etching or oxidation), whereby reliability ofa semiconductor device can be improved.

An embodiment of the present invention is a method for manufacturing asemiconductor device including the steps of: forming a gate electrodelayer over a substrate; forming a gate insulating film over the gateelectrode layer; forming an oxide semiconductor film containing indium,gallium, and zinc over the gate insulating film; forming a channelprotective layer in a region overlapping with a channel formation regionover the semiconductor film; forming a film having n-type conductivityover the semiconductor film; forming a conductive film over the filmhaving n-type conductivity; forming a resist mask over the conductivefilm; and etching the conductive film, the film having n-typeconductivity, and the semiconductor film using the resist mask to formsource and drain electrode layers, a buffer layer, and a semiconductorlayer.

An embodiment of the present invention is a method for manufacturing asemiconductor device including the steps of: forming a gate electrodelayer having a light-shielding property over a substrate having alight-transmitting property; forming a gate insulating film having alight-transmitting property over the gate electrode layer; forming anoxide semiconductor film containing indium, gallium, and zinc over thegate insulating film; forming an insulating film having alight-transmitting property over the semiconductor film; forming aphotoresist film over the insulating film; exposing the photoresist filmto light from the substrate side using the gate electrode layer as aphotomask to form a resist mask; and forming a channel protective layerusing the resist mask.

An embodiment of the present invention is a method for manufacturing asemiconductor device in which a gate insulating film and a channelprotective layer serve as etching stoppers.

According to the present invention, a thin film transistor having asmall photocurrent, low parasitic capacitance, a high on-off ratio, andfavorable dynamic characteristics (f characteristics) can bemanufactured with a small number of steps. Accordingly, a semiconductordevice including the thin film transistor having excellent electriccharacteristics and high reliability can be provided by a method withexcellent productivity.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1D are diagrams illustrating a semiconductor device to whichan embodiment of the present invention is applied.

FIGS. 2A and 2B are diagrams illustrating a method for manufacturing asemiconductor device to which an embodiment of the present invention isapplied.

FIGS. 3A to 3D are diagrams illustrating a method for manufacturing asemiconductor device to which an embodiment of the present invention isapplied.

FIGS. 4A and 4B are diagrams illustrating a method for manufacturing asemiconductor device to which an embodiment of the present invention isapplied.

FIGS. 5A to 5D are diagrams illustrating a semiconductor device to whichan embodiment of the present invention is applied.

FIG. 6 is a top schematic diagram illustrating a multi-chambermanufacturing apparatus.

FIGS. 7A and 7B are block diagrams each illustrating a display device.

FIG. 8 is a diagram illustrating a structure of a signal line drivercircuit.

FIG. 9 is a timing chart showing operation of a signal line drivercircuit.

FIG. 10 is a timing chart showing operation of a signal line drivercircuit.

FIG. 11 is a diagram illustrating a structure of a shift register.

FIG. 12 is a diagram illustrating a connecting structure of flip-flopsillustrated in FIG. 11.

FIGS. 13A and 13B are diagrams illustrating a liquid crystal displaydevice to which an embodiment of the present invention is applied.

FIG. 14 is a diagram illustrating electronic paper to which anembodiment of the present invention is applied.

FIGS. 15A and 15B are diagrams illustrating a light-emitting displaydevice to which an embodiment of the present invention is applied.

FIG. 16 is a diagram illustrating a light-emitting display device towhich an embodiment of the present invention is applied.

FIGS. 17A to 17C are diagrams each illustrating a light-emitting displaydevice to which an embodiment of the present invention is applied.

FIGS. 18A and 18B are diagrams illustrating a light-emitting displaydevice to which an embodiment of the present invention is applied.

FIGS. 19A1, 19A2, and 19B are diagrams each illustrating a liquidcrystal display device to which an embodiment of the present inventionis applied.

FIG. 20 is a diagram illustrating a liquid crystal display device towhich an embodiment of the present invention is applied.

FIGS. 21A and 21B are diagrams each illustrating an electronic applianceto which an embodiment of the present invention is applied.

FIG. 22 is a diagram illustrating an electronic appliance to which anembodiment of the present invention is applied.

FIGS. 23A and 23B are diagrams each illustrating an electronic applianceto which an embodiment of the present invention is applied.

FIG. 24 is a diagram illustrating an electronic appliance to which anembodiment of the present invention is applied.

FIG. 25 is a diagram illustrating an electronic appliance to which anembodiment of the present invention is applied.

DETAILED DESCRIPTION OF THE INVENTION

The embodiments of the present invention will be described withreference to the accompanying drawings. However, the present inventionis not limited to the following description, and it will be easilyunderstood by those skilled in the art that various changes andmodifications can be made to the modes and their details withoutdeparting from the spirit and scope of the present invention. Therefore,the present invention should not be construed as being limited to thedescription in the following embodiments. Note that a common referencenumeral refers to the same part or a part having a similar functionthroughout the drawings in the structure of the present inventiondescribed below, and the description thereof is omitted.

Embodiment 1

In this embodiment, a manufacturing process of an inverted staggered(bottom gate) thin film transistor in which an oxide semiconductor layercontaining In, Ga, and Zn is used, a buffer layer is provided betweenthe semiconductor layer and source and drain electrode layers, and achannel protective layer is provided is described with reference toFIGS. 1A to 1D and FIGS. 2A and 2B.

FIGS. 1A to 1D show a manufacturing process of a bottom gate thin filmtransistor of this embodiment. FIG. 2A is a plane view of a thin filmtransistor manufactured through steps of FIGS. 1A to 1D, and FIG. 2B isa cross-sectional view taken along a line A1-A2 in FIG. 2A.

As a substrate 100, any of the following substrates can be used:non-alkaline glass substrates made of barium borosilicate glass,aluminoborosilicate glass, aluminosilicate glass, and the like by afusion method or a float method; ceramic substrates; plastic substrateshaving heat resistance enough to withstand a process temperature of thismanufacturing process; and the like. Alternatively, a metal substratesuch as a stainless steel alloy substrate, provided with an insulatingfilm over its surface, may also be used. When the substrate 100 ismother glass, the substrate may have any of the following sizes: thefirst generation (320 mm×400 mm), the second generation (400 mm×500 mm),the third generation (550 mm×650 mm), the fourth generation (680 mm×880mm, or 730 mm×920 mm), the fifth generation (1000 mm×1200 mm, or 1100mm×1250 mm), the sixth generation (1500 mm×1800 mm), the seventhgeneration (1900 mm×2200 mm), the eighth generation (2160 mm×2460 mm),the ninth generation (2400 mm×2800 mm, or 2450 mm×3050 mm), the tenthgeneration (2950 mm×3400 mm), and the like.

Further, an insulating film may be provided as a base film over thesubstrate 100. The base film can be formed to have a single-layerstructure or a layered structure of a silicon oxide film, a siliconnitride film, a silicon oxynitride film, and/or a silicon nitride oxidefilm by a CVD method, a sputtering method, or the like.

A gate electrode layer 111 is formed using a metal material. As themetal material, aluminum, chromium, titanium, tantalum, molybdenum,copper, or the like is applied. A preferred example of the gateelectrode is formed using aluminum or a stack of aluminum and barriermetal. As the barrier metal, refractory metal such as titanium,molybdenum, or chromium is applied. The barrier metal is preferablyprovided for preventing hillocks and oxidation of aluminum.

A conductive film which is to be the gate electrode layer 111 is formedto a thickness of from 50 to 300 nm. By forming the gate electrode to athickness of 300 nm or less, disconnection of a semiconductor film andwirings which are formed later can be prevented. Further, by forming thegate electrode to a thickness of 150 nm or more, resistance of the gateelectrode can be reduced and thus the size of the substrate can beincreased.

Note that since a semiconductor film and a wiring are to be formed overthe gate electrode layer 111, it is desired that the gate electrodelayer 111 be processed to have tapered end portions in order to preventdisconnection. In addition, although not illustrated, in this step, awiring or a capacitor wiring connected to the gate electrode can also beformed at the same time.

The gate electrode layer 111 can be formed by a sputtering method, a CVDmethod, a plating method, or a printing method. Alternatively, the gateelectrode layer 111 can be formed using a conductive nanopaste ofsilver, gold, copper, or the like by discharging droplets containingconductive particles or the like by an ink-jet method and baking it.

Note that here, an aluminum film and a molybdenum film are formed as aconductive film over the substrate by a sputtering method and is etchedwith the use of a resist mask formed using a first photomask of thisembodiment, so that the gate electrode layer 111 is formed.

Gate insulating films 102 a and 102 b can each be formed using a siliconoxide film, a silicon nitride film, a silicon oxynitride film, or asilicon nitride oxide film with a thickness of from 50 to 150 nm. Notethat the gate insulating film can be formed to have a single layerstructure of a silicon oxide film, a silicon nitride film, a siliconoxynitride film, or a silicon nitride oxide film, instead of such atwo-layer structure. Alternatively, the gate insulating film may beformed to have a three-layer structure.

By forming the gate insulating film 102 a using a silicon nitride filmor a silicon nitride oxide film, adhesiveness between the substrate andthe gate insulating film 102 a is increased, and in the case where aglass substrate is used as the substrate, an impurity can be preventedfrom diffusing into a semiconductor layer 103 from the substrate andfurther, the gate electrode layer 111 can be prevented from beingoxidized. That is to say, film peeling can be prevented, and thuselectric characteristics of a thin film transistor to be completed latercan be improved. Further, the gate insulating films 102 a and 102 b eachpreferably have a thickness of 50 nm or more so that they can coverunevenness of the gate electrode layer 111.

Here, a silicon oxynitride film refers to a film that contains oxygenand nitrogen such that the amount of oxygen is larger than that ofnitrogen and contains oxygen, nitrogen, silicon, and hydrogen atconcentrations of 55 to 65 at. %, 1 to 20 at. %, 25 to 35 at. %, and 0.1to 10 at. %, respectively. Further, a silicon nitride oxide film refersto a film that contains oxygen and nitrogen such that the amount ofnitrogen is larger than that of oxygen and includes oxygen, nitrogen,silicon, and hydrogen at concentrations of 15 to 30 at. %, 20 to 35 at.%, 25 to 35 at. %, and 15 to 25 at. %, respectively.

Further, for the gate insulating film 102 b in contact with thesemiconductor layer 103, silicon oxide, aluminum oxide, magnesium oxide,aluminum nitride, yttrium oxide, hafnium oxide, or the like can be used.

The gate insulating films 102 a and 102 b can each be formed by a CVDmethod, a sputtering method, or the like. Here, as illustrated in FIG.1A, a silicon nitride film is formed by a plasma CVD method as the gateinsulating film 102 a, and a silicon oxide film is formed by asputtering method as the gate insulating film 102 b.

In particular, it is desirable to successively form the gate insulatingfilm 102 b in contact with a semiconductor film, and the semiconductorfilm 103. By the successive film formation, an interface of the stackedfilms can be formed without being contaminated by an atmosphericcomponent such as water vapor and impurity elements and dusts whichfloat in the air. Thus, variations in thin film transistorcharacteristics can be reduced.

As for an active matrix display device, electric characteristics of athin film transistor included in a circuit are significant andperformance of the display device depends on the electriccharacteristics. The threshold voltage (V_(th)) is particularlysignificant among the electric characteristics of the thin filmtransistor. Even when field effect mobility is high, if the value of thethreshold voltage is high or below zero, it is difficult to control acircuit. A thin film transistor in which the value of the thresholdvoltage is high and the absolute value of the threshold voltage is largemight not be able to achieve a switching function and might be a load inthe state where the driving voltage is low. Further, in the case wherethe value of the threshold voltage is below zero, a thin film transistoris likely to be in a so-called normally-on state in which a currentflows between a source electrode and a drain electrode even when a gatevoltage is 0 V.

In the case of an n-channel thin film transistor, it is desirable thatonly after a positive voltage is applied as a gate voltage, a channel beformed and a drain current flows. A transistor in which a channel is notformed unless the driving voltage is high and a transistor in which evenwhen a negative voltage is applied, a channel is formed and then a draincurrent flows are not suitable as a thin film transistor used for acircuit. Therefore, in the case of a thin film transistor using an oxidesemiconductor film containing In, Ga, and Zn, a channel is desirablyformed at a threshold voltage of the gate voltage which is a positiveand close to 0 V.

A threshold voltage of a thin film transistor is considered tosignificantly depend on the interface of an oxide semiconductor layer,that is, the interface between an oxide semiconductor layer and a gateinsulating film. By forming the interface thereof so that it is clean,electric characteristics of a thin film transistor can be improved and amanufacturing process can be prevented from being complicated. Thus,both mass productivity and high performance of the thin film transistorcan be achieved.

In particular, when moisture is at the interface between an oxidesemiconductor layer and a gate insulating film, there occurs a problemsuch as degradation of electric characteristics of a thin filmtransistor, variations in threshold voltages, or normally-on. Bysuccessively forming the oxide semiconductor layer and the gateinsulating film, such a hydrogen compound can be removed.

Thus, the gate insulating film and the semiconductor film aresuccessively formed under reduced pressure by a sputtering methodwithout being exposed to the air, so that a thin film transistor havinga favorable interface, a small leakage current, and high current drivingcapability can be achieved.

Note that successive film formation in this specification means that aseries of steps from a first film formation step by a sputtering methodto a second film formation step by a sputtering method are performed bycontrolling an atmosphere in which a process substrate is provided sothat it is constantly in vacuum or an inert gas atmosphere (a nitrogenatmosphere or a rare gas atmosphere) without being exposed to acontaminated atmosphere such as the air. By the successive filmformation, film formation can be performed without reattachment ofmoisture or the like to the process substrate, which has been cleaned.

Performing the series of steps from the first film formation step to thesecond film formation step in the same chamber is in the range of thesuccessive film formation in this specification.

Further, performing the series of steps from the first film formationstep to the second film formation step in different chambers, in whichafter the first film formation step is completed, a substrate istransferred between the chambers without being exposed to the air andthe second film formation is performed, is also in the range of thesuccessive film formation in this specification.

Note that the case where there is a substrate transfer step, analignment step, a slow cooling step, a step of heating or cooling asubstrate so that the temperature of the substrate is suitable to thesecond film formation step, or the like between the first film formationstep and the second film formation step is also in the range of thesuccessive film formation in this specification.

However, the case where there is a step in which liquid is used, such asa cleaning step, wet etching, or resist formation, between the firstfilm formation step and the second film formation step is not in therange of the successive film formation in this specification.

Further, by forming the gate insulating film, the semiconductor layer,and the channel protective layer in an oxygen atmosphere (or anatmosphere containing oxygen at 90% or more and a rare gas (such asargon) at 10% or less), reduction in reliability due to deterioration, ashift of thin film transistor characteristics to the normally-on side,and the like can be suppressed. Further, the buffer layer having n-typeconductivity is preferably formed in a rare gas (such as argon)atmosphere.

By thus successively forming the films by a sputtering method,productivity and reliability of an interface of the thin films can beincreased. Further, by forming the gate insulating film and thesemiconductor layer in an oxygen atmosphere so that they contain a largemount of oxygen, reduction in reliability due to deterioration andnormally-on of a thin film transistor can be suppressed.

Further, it is also desirable to form an insulating film 106 to be achannel protective layer 116, following the formation of thesemiconductor film 103. By the successive film formation, an interfaceof the stacked films can be formed in a region on a side reverse of theside of a surface of the semiconductor film 103 in contact with a gateinsulating film, a so-called back channel, without being contaminated byan atmospheric component such as water vapor and impurity elements anddusts which float in the air. Thus, variations in thin film transistorcharacteristics can be reduced.

For a method for successive film formation, a multi-chamber sputteringapparatus equipped with a plurality of film formation chambers, asputtering apparatus provided with a plurality of targets, or a PLD(pulsed laser deposition) apparatus may be used.

In the case of depositing silicon oxide for the insulating film, theinsulating film can be formed by a high frequency sputtering method or areactive sputtering method using silicon oxide (artificial quartz) orsilicon as a target.

Note that here, the semiconductor film 103 and the insulating film 106to be the channel protective layer are successively formed without beingexposed to the air after formation of a silicon oxide film as the secondgate insulating film 102 b in contact with the semiconductor film byusing a multi-chamber sputtering apparatus provided with a silicontarget and a target for the semiconductor film.

The semiconductor layer 103 is formed using an amorphous oxidesemiconductor film. For the amorphous oxide semiconductor film, acomposite oxide of an element such as indium, gallium, aluminum, zinc,or tin can be used.

In the case of oxide containing indium oxide, gallium oxide, and zincoxide, the composition ratio of the metal elements is highly flexiblyset and the oxide functions as a semiconductor layer at a wide range ofmixture ratio. For example, a material in which indium oxide, galliumoxide, and zinc oxide are mixed in an equimolar ratio, and oxidecontaining In, Ga, and Zn at a ratio of 2.2:2.2:1.0 can be given.

The semiconductor film 103 is preferably formed to a thickness of from 2nm to 200 nm, more preferably from 20 to 150 nm. Further, when theoxygen vacancy rate in the film is increased, a carrier concentration isincreased and thus thin film transistor characteristics are degraded.Therefore, an IGZO film containing excessive oxygen is formed byperforming sputtering by a pulsed DC sputtering method under, forexample, an atmosphere containing only oxygen or atmosphere containingoxygen at 90% and Ar at 10%.

The amorphous oxide semiconductor film can be formed by a reactivesputtering method, a pulsed laser deposition method (PLD method), or asol-gel method. Among gas phase methods, a PLD method is suitable interms of easiness in controlling the composition of materials and asputtering method is suitable in terms of mass productivity as describedabove. Here, a method using oxide containing In, Ga, and Zn (IGZO) isdescribed as an example of a method for forming the semiconductor layer.

A target with a diameter of 8 inch obtained by mixing indium oxide(In₂O₃), gallium oxide (Ga₂O₃), and zinc oxide (ZnO) in an equimolarratio and performing sintering is used, a substrate is provided 170 mmapart from the target, and direct current (DC) sputtering is performedwith an output of 500 W, so that the semiconductor layer is formed. Thesemiconductor layer is formed to a thickness of 50 nm under theconditions that the chamber pressure is 0.4 Pa and the gas compositionratio of Ar to O₂ is 10/5 sccm. It is desirable that an oxygen partialpressure in film formation be set higher than that in forming atransparent conductive film of indium tin oxide (ITO) or the like tocontrol the oxygen concentration in a film formation atmosphere so thatoxygen vacancy is suppressed. Further, it is preferable to use a pulseddirect current (DC) power supply because dusts can be reduced and thethickness distribution of the semiconductor layer can be uniform.

Further, the semiconductor film 103 may be subjected to plasmatreatment. By the plasma treatment, damage of the semiconductor film 103can be repaired. The plasma treatment is preferably performed in anatmosphere of O₂ or N₂O, or preferably an atmosphere of N₂, He, or Arcontaining oxygen. Alternatively, the plasma treatment may be performedin the above atmosphere to which Cl₂ or CF₄ is added. Note that theplasma treatment is preferably performed with non-bias.

Note that in this embodiment, the semiconductor film 103 is formed overthe gate insulating film 102 b formed in the former step withoutexposing the gate insulating film 102 b to the air by using amulti-chamber sputtering apparatus provided with a target for an oxidesemiconductor film and a silicon target. In the following step, theinsulating film 106 to be the channel protective layer is formed overthe formed semiconductor film 103 without exposing the semiconductorfilm 103 to the air.

The channel protective layer 116 is formed using an insulating film in aregion overlapping with a channel formation region of the semiconductorlayer. The insulating film 106 to be the channel protective layer can beformed using an inorganic material (such as silicon oxide, siliconnitride, silicon oxynitride, or silicon nitride oxide). Further, a filmformed using one or a plurality of kinds of photosensitive ornonphotosensitive organic materials (organic resin materials) (such aspolyimide, acrylic, polyamide, polyimide amide, resist, andbenzocyclobutene) or a stack of such films can be used. Further,siloxane may be used.

The insulating film 106 to be the channel protective layer can be formedby a vapor phase growth method such as a plasma CVD method or a thermalCVD method, or a sputtering method. Alternatively, an application methodsuch as a spin coating method which is a wet process can be used.Alternatively, the insulating film 106 may be selectively formed by adroplet discharge method, a printing method (a method for forming apattern, such as screen printing or offset printing), or the like.

Note that here, a silicon oxide film is formed as the insulating film106 without exposing the oxide semiconductor film 103 formed in theformer step to the air by using a multi-chamber sputtering apparatusprovided with a silicon target and a target for the oxide semiconductorfilm.

Next, a resist mask 117 is formed with the use of a second photomask ofthis embodiment as illustrated in FIG. 1A. The insulating film 106formed over the semiconductor film 103 is selectively etched by usingthe resist mask 117, so that the channel protective layer 116 is formedas illustrated in FIG. 1B.

Next, a film 104 having n-type conductivity which functions as a bufferlayer is formed over the semiconductor film 103. The buffer layerfunctions as an n⁺ layer, and can be called a source region and a drainregion. In addition, a second buffer layer whose carrier concentrationis higher than that of the semiconductor layer and lower than that ofthe buffer layer may be provided between the semiconductor layer and thebuffer layer. The second buffer layer functions as an n⁻ layer.

For the buffer layer, metal oxide having n-type conductivity and anoxide semiconductor film containing In, Ga, and Zn can be used.

For the metal oxide having n-type conductivity that can be used for thebuffer layer, titanium oxide, molybdenum oxide, zinc oxide, indiumoxide, tungsten oxide, magnesium oxide, calcium oxide, tin oxide, or thelike can be used for example. The buffer layer may contain an impurityimparting n-type or p-type conductivity. As the impurity, indium,gallium, aluminum, zinc, tin, or the like can be used. In particular,the buffer layer preferably contains titanium. Since the buffer layerformed using the metal oxide has a higher carrier concentration than theIGZO semiconductor layer 113 in which the channel is formed and issuperior in conductivity, the contact resistance can be reduced ascompared to the case of directly attaching the source and drainelectrode layers to the semiconductor layer.

Further, for the buffer layer, an oxide semiconductor film having n-typeconductivity and containing In, Ga, and Zn can also be used. An impurityelement imparting n-type conductivity may be included in the oxidesemiconductor film containing In, Ga, and Zn. As the impurity element,for example, magnesium, aluminum, titanium, scandium, yttrium,zirconium, hafnium, boron, thallium, germanium, tin, lead, or the likecan be used. In the case where magnesium, aluminum, titanium, or thelike is contained in the buffer layer, there is an effect of blockingoxygen, and the like, so that the oxygen concentration of asemiconductor layer can be maintained within an optimal range by heattreatment or the like after film formation.

In addition, a second buffer layer functioning as an n⁻ layer, whosecarrier concentration is higher than that of the semiconductor layer andlower than that of the buffer layer, may be provided between thesemiconductor layer and the buffer layer.

The film 104 having n-type conductivity may be formed to have athickness of greater than or equal to 2 nm and less than or equal to 100nm.

The film 104 having n-type conductivity can be formed by a sputteringmethod or a pulsed laser deposition method (PLD method).

Next, a conductive film 105 to be a source electrode layer and a drainelectrode layer is formed. The conductive film 105 can be formed usingthe same material as the gate electrode layer 111. In particular, alayer in contact with the film 104 having n-type conductivity ispreferably a titanium film. As specific examples of the conductive film,a single titanium film, a layered film including a titanium film and analuminum film, and a three-layer film in which a titanium film, analuminum film, and a titanium film are sequentially stacked are given.

Next, a resist mask 118 is formed using a third photomask of thisembodiment as illustrated in FIG. 1C, and the conductive film 105 formedover the channel protective layer 116 is etched using the resist mask118 to be separated as illustrated in FIG. 1D, whereby source and drainelectrode layers 115 a and 115 b are formed.

Further, the film 104 having n-type conductivity is etched using thesame resist mask 118 to be separated, whereby buffer layers 114 a and114 b are formed.

Further, the channel protective layer 116 not only prevents damage tothe channel formation region in the etching step but also functions asan etching stopper. That is, when an unnecessary portion of thesemiconductor film 103 is removed by etching, the channel protectivelayer 116 prevents the channel formation region of the semiconductorlayer 103 from being removed. In addition, since the gate insulatingfilm 102 b or 102 a also functions as an etching stopper, theunnecessary portion of the semiconductor film 103 can be easily etched.As a result, the source and drain electrode layers (115 a, 115 b), thebuffer layers (114 a, 114 b), and the semiconductor layer 113 can beformed using the resist mask 118.

Note that each film may be processed using dry etching or wet etching,or each film may be selectively etched in two separate steps.

Characteristics of the thin film transistor in which the oxidecontaining In, Ga, and Zn (IGZO) described in this embodiment is usedfor the semiconductor layer 113 are improved by performing heattreatment on the semiconductor layer 113 which is formed. Specifically,on current is increased, and variation in the characteristics of thetransistor is reduced.

Heat treatment may be preferably performed on the semiconductor layer113 at temperatures of 300° C. to 400° C., and here, the heat treatmentis performed at 350° C. for an hour. The heat treatment may be performedanytime after the semiconductor layer 113 is formed. For example, theheat treatment may be performed after the gate insulating film 102 b,the semiconductor film 103, and the insulating film 106 to be thechannel protective layer are successively formed; after the channelprotective layer 116 is formed by patterning; after the film 104 havingn-type conductivity functioning as buffer layers is formed; or after theconductive film 105 is formed. Alternatively, the heat treatment may beperformed after the source and drain electrode layers (115 a, 115 b),the buffer layers (114 a, 114 b), and the semiconductor layer 113 areformed or after a sealing film of the thin film transistor is formed, orheat curing treatment performed after formation of a planarizing filmmay also serve as the heat treatment for the semiconductor layer.

In accordance with the above description, an inverted staggered (bottomgate) thin film transistor illustrated in FIGS. 2A and 2B ismanufactured.

The buffer layers 114 a and 114 b of the thin film transistormanufactured in this embodiment have a higher carrier concentration thanthe semiconductor layer 113 and thus have excellent conductivity.Therefore, in the case of providing the buffer layers 114 a and 114 b,contact resistance can be reduced as compared to the case where thesemiconductor layer 113 and the source and drain electrode layers aredirectly bonded to each other. Further, by providing the buffer layers114 a and 114 b at the bonding interface between the semiconductor layer113 and the source and drain electrode layers, an electric fieldconcentrated at the bonding interface can be reduced.

The thin film transistor manufactured in this embodiment is providedwith the channel protective layer 116; therefore, a region on a sidereverse of the side of a surface of the oxide semiconductor film incontact with the gate insulating film 102 b, a so-called back channel,can be protected from damage (such as reduction in film thickness due toplasma or an etchant at the time of etching and oxidation) in theprocess. Therefore, reliability of a thin film transistor can beimproved.

Further, by successively forming the gate insulating film 102 b incontact with the semiconductor layer 113, the semiconductor layer 113,and the channel protective layer, interfaces of the stacked films can beformed without being contaminated by an atmospheric component such aswater vapor and impurity elements and dusts which float in the air.Thus, variations in thin film transistor characteristics can be reduced.

Further, by using the channel protective layer and the gate insulatingfilm as etching stoppers, the conductive film 105 to be source and drainelectrode layers, the film 104 having n-type conductivity which is to bebuffer layers, and the semiconductor film 103 can be etched using theresist mask 118 which is manufactured using the third photomask, andthus a process can be simplified.

Thus, by applying an embodiment of the present invention, a thin filmtransistor having a small photocurrent, low parasitic capacitance, and ahigh on-off ratio can be obtained and thus a thin film transistor havingfavorable dynamic characteristics (f characteristics) can bemanufactured with high yield. Further, a semiconductor device includingthe thin film transistor having excellent electric characteristics andhigh reliability can be provided by a method with excellentproductivity.

Embodiment 2

In this embodiment, a method for manufacturing an inverted staggered(bottom gate) thin film transistor having the structure in which abuffer layer contains an IGZO semiconductor layer, which is differentfrom the structure of Embodiment 1, will be described with reference toFIGS. 3A to 3D and FIGS. 4A and 4B. In addition, in this embodiment, thesame reference numerals are used for the same portions as those inEmbodiment 1 and detailed description of the portions is omitted.

FIGS. 3A to 3D illustrate a manufacturing process of a bottom gate thinfilm transistor of this embodiment. FIG. 4A is a plane view of a thinfilm transistor manufactured through steps of FIGS. 3A to 3D, and FIG.4B is a cross-sectional view taken along a line A1-A2 in FIG. 4A.

In this embodiment, the substrate 100 having a light-transmittingproperty is used. As the substrate having a light-transmitting property,for example, non-alkaline glass substrates manufactured by a fusionmethod or a float method, such as a barium borosilicate glass substrate,an aluminoborosilicate glass substrate, an aluminosilicate glasssubstrate, and the like; plastic substrates having heat resistance highenough to withstand a process temperature of this manufacturing process;and the like can be given. Note that, as in Embodiment 1, an insulatingfilm may be formed as a base film over the substrate 100.

The gate electrode layer 111 is formed using a metal material having alight-transmitting property. As a metal material, aluminum, chromium,titanium, tantalum, molybdenum, copper, or the like is applied. Apreferred example of the gate electrode is formed using aluminum or astacked structure of aluminum and barrier metal. As the barrier metal,refractory metal such as titanium, molybdenum, or chromium is applied.The barrier metal is preferably provided for preventing hillocks andoxidation of aluminum. The thickness, the shape of end portions, a filmformation method, or the like of the gate electrode layer 111 having alight-shielding property is set as in Embodiment 1.

Note that here, an aluminum film and a molybdenum film are formed as aconductive film over the substrate by a sputtering method and is etchedwith the use of a resist mask formed using a first photomask of thisembodiment, so that the gate electrode layer 111 is formed.

The gate insulating film 102 a, the gate insulating film 102 b which isin contact with the semiconductor film 103, the semiconductor film 103,and the insulating film 106 which is to be the channel protective layerare stacked over the gate electrode layer 111 in this order. In thisembodiment, a light-transmitting insulating material is selected for thegate insulating films (102 a, 102 b) and the insulating film 106. Asilicon oxide film, a silicon nitride film, a silicon oxynitride film,or a silicon nitride oxide film can be used for formation of alight-transmitting insulating film. Note that the thickness, a formationmethod, or the like of the light-transmitting insulating film is set asin Embodiment 1.

Here, a silicon nitride film is formed by a plasma CVD method as thegate insulating film 102 a, and a silicon oxide film is formed by asputtering method as the gate insulating film 102 b. The gate insulatingfilm 102 b, the semiconductor film 103, and the insulating film 106 tobe the channel protective layer are successively formed to be stacked asin Embodiment 1. By the successive film formation, an interface of thestacked films can be formed in the channel formation region and a backchannel without being contaminated by an atmospheric component such aswater vapor and impurity elements and dusts which float in the air. As aresult, variations in thin film transistor characteristics can bereduced and off current can be suppressed. Note that, since oxidecontaining In, Ga, and Zn (IGZO) is a material whose band gap is large,the semiconductor film 103 using IGZO transmits light well.

Next, a positive photoresist film is formed by spin coating over theinsulating film 106. In a structure formed through the steps describedabove, since only the gate electrode layer 111 has a light-shieldingproperty, if the photoresist film is exposed to light from the substrate100 side, only a region overlapping with the gate electrode layer 111 ofthe photoresist film is not exposed to the light. That is, the gateinsulating film functions as a photomask, and the resist mask 117 isformed in the region overlapping with the gate electrode layer (see FIG.3A).

Next, the insulating film 106 is etched using the resist mask 117 toform the channel protective layer 116. Note that, in etching the channelprotective layer 116, the surface of the semiconductor film 103 may beslightly etched as illustrated in FIG. 3B. By etching the surface of thesemiconductor film 103, favorable contact state between thesemiconductor film 103 and the film 104 having n-type conductivity whichis stacked over the semiconductor film 103 can be obtained.

Next, the film 104 having n-type conductivity which is to be bufferlayers and the conductive film 105 to be source and drain electrodelayers are stacked over the semiconductor film 103 and the channelprotective layer 116 by a method similar to that in Embodiment 1.

Here, a three-layer film is formed by a sputtering method as theconductive film 105. For example, a three-layer film formed of atitanium film (105-1), an aluminum film (105-2), and a titanium film(105-3) can be used.

Next, the conductive film 105 formed using a three-layer film is etchedusing the resist mask 118 which is formed using a second photomask ofthis embodiment, whereby the source and drain electrode layers 115 a and115 b are formed.

As in Embodiment 1, the film 104 having n-type conductivity is etchedusing the resist mask 118 to form the buffer layers 114 a and 114 b.

Further, an unnecessary portion of the semiconductor layer 113 isremoved by etching using the resist mask 118 and the channel protectivelayer 116 as masks. FIG. 3D illustrates a state in which a surface ofthe channel protective layer 116 is slightly etched to have a depressedshape in accordance with etching of the film 104 having n-typeconductivity and the semiconductor film 103; however, it is acceptableas long as damage to a channel formation portion is prevented. Further,FIG. 3D illustrates a state in which the thickness of the gateinsulating film 102 b which is outside the thin film transistor isreduced or removed; however, it is acceptable as long as the gateinsulating film in an inside of the thin film transistor remains.

The semiconductor layer 113 which is formed is subjected to heattreatment in a similar manner to Embodiment 1.

In the present invention, since the resist mask 117 is formed using thegate electrode layer 111 as a photomask, the number of photomasks thatare used can be reduced, and misalignment is not generated. Further,since the channel formation region of the semiconductor layer 113 isprotected by the channel protective layer 116, the conductive film 105to be source and drain electrode layers, the film 104 having n-typeconductivity to be buffer layers, and the semiconductor film 103 can beetched using the resist mask 118 which is manufactured using the secondphotomask, and thus a process can be simplified.

Accordingly, by application of an embodiment of the present invention, athin film transistor with a small photocurrent, low parasiticcapacitance, and a high on/off ratio can be obtained, and the thin filmtransistor having dynamic characteristics (f characteristics) can bemanufactured with high yield. In addition, a semiconductor deviceincluding the thin film transistor with high electric characteristicsand high reliability can be provided by a method with excellentproductivity.

Embodiment 3

In this embodiment, a method for manufacturing a thin film transistor inwhich an IGZO semiconductor layer having a structure in which aplurality of channel formation regions are connected is used isdescribed with reference to FIGS. 5A to 5D.

FIG. 5A is a cross-sectional view illustrating a state in which theresist mask is formed over the conductive film 105 using a thirdphotomask of this embodiment. FIG. 5B is a cross-sectional viewillustrating a state in which the conductive film 105, the film 104having n-type conductivity, and the semiconductor film 103 are etched.FIG. 5C is a plane view illustrating a completed TFT, and FIG. 5D is across-sectional view taken along a line A1-A2 in FIG. 5C. Note that, inthis embodiment, the same reference numerals are used for the sameportions as those in Embodiment 1 and detailed description of theportions is omitted.

Gate electrode layers 111 a and 111 b are formed over the substrate 100as in Embodiment 1 using a resist mask which is formed using a firstphotomask of this embodiment. Next, the gate insulating film 102 a isformed over the gate electrode layers 111 a and 111 b. Next, the gateinsulating film 102 b which is in contact with the semiconductor film103, the semiconductor film 103, and the insulating film 106 to bechannel protective layers are successively formed by a sputteringmethod.

Channel protective layers 116 a and 116 b are formed in a regionoverlapping with the channel formation region of the semiconductor layerusing a resist mask which is formed using a second photomask of thisembodiment.

Next, the film 104 having n-type conductivity which is to be bufferlayers and the conductive film 105 to be source and drain electrodelayers are stacked over the semiconductor film 103 and the channelprotective layer 116 a and 116 b by a method similar to that inEmbodiment 1.

After the resist mask is formed using the third photomask of thisembodiment as illustrated in FIG. 5A, the conductive film 105, the film104 having n-type conductivity, and the semiconductor film 103 areetched. The conductive film 105 forms the source and drain electrodelayers (115 a, 115 b) and a conductive layer 115 c which connects twochannel formation regions, the film 104 having n-type conductivity formsthe buffer layers 114 a and 114 b and a layer 114 c having n-typeconductivity which connects the two channel formation regions, and thesemiconductor film 103 is etched to form the semiconductor layer 113(see FIG. 5B). Note that FIG. 5D illustrates a state in which endportions of the source and drain electrode layers (115 a, 115 b) arerecessed than the buffer layers (114 a, 114 b). With the end portions ofthe source and drain electrode layers (115 a, 115 b) recessed,short-circuit between the source electrode and the drain electrode isnot easily generated.

Note that, although a structure in which two channel formation regionsare connected is employed in this embodiment, an embodiment of thepresent invention is not limited thereto, and a so-called multi-gatestructure (a structure having two or more channel formation regionswhich are connected in series) such as a triple-gate structure in whichthree channel formation regions are connected may be employed.

Further, the two channel formation regions of the thin film transistordescribed in this embodiment are electrically connected to each otherthrough the semiconductor layer 113, the layer 114 c having n-typeconductivity, and the conductive layer 115 c.

Further, the semiconductor layer 113 which is formed is subjected toheat treatment in a similar manner to Embodiment 1.

In the present invention, the channel formation region of thesemiconductor layer 113 is protected by the channel protective layer 116a and 116 b. Further, the conductive film 105 to be source and drainelectrode layers, the film 104 having n-type conductivity which is to bebuffer layers, and the semiconductor film 103 can be etched using theresist mask 118 which is manufactured using the third photomask, andthus a process can be simplified. Furthermore, such a multi-gatestructure is extremely effective for reducing an off current value.

Accordingly, by application of an embodiment of the present invention, athin film transistor with a small photocurrent, low parasiticcapacitance, and a high on/off ratio can be obtained, and the thin filmtransistor having dynamic characteristics (f characteristics) can bemanufactured with high yield. In addition, a semiconductor deviceincluding the thin film transistor with high electric characteristicsand high reliability can be provided by a method with excellentproductivity.

Embodiment 4

In this embodiment, a manufacturing example of an inverted-staggeredthin film transistor is described, in which at least a gate insulatingfilm and an oxide semiconductor film are formed to be stackedsuccessively without being exposed to the air. In this embodiment, stepsup to a step of the successive film formation are described and stepsafter the successive film formation may be performed in accordance withany one of Embodiments 1 to 3 to manufacture a thin film transistor.

When films are successively formed without being exposed to the air,such a multi-chamber manufacturing apparatus illustrated in FIG. 6 ispreferably used.

At the center of the manufacturing apparatus, a transfer chamber 80equipped with a transfer mechanism for transferring a substrate(typically, a transfer robot 81) is provided. A cassette chamber 82 inwhich a cassette case holding a plurality of substrates carried into andout of the transfer chamber 80 is set is connected to the transferchamber 80.

In addition, a plurality of treatment chambers are connected to thetransfer chamber through gate valves 83 to 88. In this embodiment, anexample in which five treatment chambers are connected to the transferchamber 80 having a hexagonal top shape is illustrated. Note that bychanging the top shape of the transfer chamber, the number of treatmentchambers which can be connected to the transfer chamber can be changed.For example, three treatment chambers can be connected to a transferchamber having a tetragonal shape, or seven treatment chambers can beconnected to a transfer chamber having an octagonal shape.

At least one treatment chamber among the five treatment chambers is asputtering chamber in which sputtering is performed. The sputteringchamber is provided with, at least inside the chamber, a sputteringtarget, a mechanism for applying electric power or a gas introductionmeans for sputtering the target, a substrate holder for holding asubstrate at a predetermined position, and the like. Further, thesputtering chamber is provided with a pressure control means forcontrolling the pressure in the chamber, so that the pressure is reducedin the sputtering chamber.

Examples of a sputtering method include an RF sputtering method in whicha high-frequency power source is used for a sputtering power source, aDC sputtering method, and a pulsed DC sputtering method in which a biasis applied in a pulsed manner. An RF sputtering method is mainly used inthe case of forming an insulating film, and a DC sputtering method ismainly used in the case of forming a metal film.

In addition, there is also a multi-source sputtering apparatus in whicha plurality of targets of different materials can be set. With themulti-source sputtering apparatus, films of different materials can bedeposited to be stacked in the same chamber, or a plurality of kinds ofmaterials can be deposited at the same time by electric discharge in thesame chamber.

In addition, there are also a sputtering apparatus provided with amagnet system inside the chamber and used for a magnetron sputteringmethod, and a sputtering apparatus used for an ECR sputtering method inwhich plasma generated with the use of microwaves is used without usingglow discharge.

In the sputtering chamber of this embodiment, any of various sputteringmethods described above is used as appropriate. In addition, as adeposition method, there are also a reactive sputtering method in whicha target substance and a sputtering gas component are chemically reactedwith each other during deposition to form a thin compound film thereof,and a bias sputtering method in which a voltage is also applied to asubstrate during deposition.

In addition, among the five treatment chambers, one of the othertreatment chambers than the sputtering chamber is a heating chamber inwhich a substrate is preheated or the like before sputtering, a coolingchamber in which a substrate is cooled after sputtering, or a chamber inwhich plasma treatment is performed.

Next, an example of an operation of the manufacturing apparatus isdescribed.

A substrate cassette storing a substrate 94 whose surface on whichdeposition is performed faces downward is set in the cassette chamber82, and the cassette chamber 82 is placed in a reduced pressure state bya vacuum evacuation means provided in the cassette chamber 82. Note thatin each of the treatment chambers and the transfer chamber 80, thepressure is reduced in advance by a vacuum evacuation means provided ineach chamber. Accordingly, during being transferred between thetreatment chambers, the substrate is not exposed to the air and can bekept clean.

Note that at least a gate electrode is provided in advance over thesubstrate 94 surface on which deposition is performed faces downward.For example, a base insulating film such as a silicon nitride film or asilicon nitride oxide film may also be provided by a plasma CVD methodbetween the substrate and the gate electrode. When a substrate made ofglass containing alkali metal is used as the substrate 94, the baseinsulating film has an effect of preventing movable ions such as sodiumions from being discharged from the substrate and entering asemiconductor region above the substrate to change electriccharacteristics of a TFT.

Here, a substrate over which a silicon nitride film covering the gateelectrode is formed by a plasma CVD method to form a first layer of agate insulating film is used. The silicon nitride film formed by aplasma CVD method is dense, so that generation of pin holes or the likecan be suppressed by using this silicon nitride film as the first layerof the gate insulating film. Although this embodiment describes anexample in which the gate insulating film has a layered structure, thepresent invention is not limited thereto, and the gate insulating filmmay be a single layer or have a layered structure including three ormore layers.

Then, the gate valve 83 is opened and the substrate 94 which is thefirst substrate is picked up from the cassette by the transfer robot 81.After that, the gate valve 84 is opened and the substrate 94 istransferred to a first treatment chamber 89, and then, the gate valve 84is closed. In the first treatment chamber 89, by heating the substrate94 by a heater or a lamp, moisture or the like attached to the substrate94 is removed. In particular, when the gate insulating film containsmoisture, electric characteristics of a TFT could possibly be changed;therefore, heating before sputtering deposition is effective. Note thatin the case where moisture has been sufficiently removed at the timewhen the substrate is set in the cassette chamber 82, this heatingtreatment is not necessary.

In addition, plasma treatment may be performed on the surface of thefirst layer of the gate insulating film by providing a plasma treatmentmeans in the first treatment chamber 89. Furthermore, heating forremoving moisture may be performed in the cassette chamber 82 byproviding a heating means in the cassette chamber 82.

Then, the gate valve 84 is opened and the substrate is transferred tothe transfer chamber 80 by the transfer robot 81. After that, the gatevalve 85 is opened and the substrate is transferred to a secondtreatment chamber 90, and the gate valve 85 is closed.

Here, the second treatment chamber 90 is a sputtering chamber in whichsputtering is performed using an RF magnetron sputtering method. In thesecond treatment chamber 90, a silicon oxide film (SiO_(x) film (x>0))is formed as a second layer of the gate insulating film. Alternatively,for the second layer of the gate insulating film, an aluminum oxide film(Al₂O₃ film), a magnesium oxide film (MgO_(x) film (x>0)), an aluminumnitride film (AlN_(x) film (x>0)), an yttrium oxide film (YO_(x) film(x>0)), or the like may be used instead of a silicon oxide film.

A small amount of a halogen element such as fluorine or chlorine may beadded to the second layer of the gate insulating film so that movableions such as sodium ions can be immobilized. As a method for adding asmall amount of a halogen element, sputtering is performed byintroducing a gas containing a halogen element into the chamber. Notethat in the case where a gas containing a halogen element is introduced,the evacuation means of the chamber is needed to be provided with anabatement system. The peak of the concentration of a halogen element tobe contained in the gate insulating film is measured by a secondary ionmass spectrometer (SIMS) and is preferably in the range of from 1×10¹⁵cm⁻³ to 1×10²⁰ cm⁻³.

When the SiO_(x) film (x>0) is formed, a sputtering method in whichartificial quartz is used as a target and a rare gas, typically, argonis used, or a reactive sputtering method in which single crystal siliconis used as a target and chemically reacted with an oxygen gas to obtaina SiO_(x) film (x>0) can be used. Here, artificial quartz is used as atarget, and sputtering is performed in an atmosphere containing onlyoxygen, an atmosphere containing oxygen at 90% or more and Ar at 10% orless so that a SiO_(x) film contains oxygen as much as possible. Thus, aSiO_(x) film (x>0) containing excessive oxygen is formed.

After the SiO_(x) film (x>0) is formed, the gate valve 85 is opened, andthe substrate is transferred to the transfer chamber 80 by the transferrobot 81 without being exposed to the air. Then, the gate valve 86 isopened, the substrate is transferred to a third treatment chamber 91,and the gate valve 86 is closed.

In this embodiment, the third treatment chamber 91 is a sputteringchamber in which sputtering is performed using a DC magnetron sputteringmethod. In the third treatment chamber 91, an oxide semiconductor filmcontaining In, Ga, and Zn (IGZO film) is formed as a semiconductorlayer. The IGZO film can be formed using an oxide semiconductor targetcontaining In, Ga, and Zn, under a rare gas atmosphere or an oxygenatmosphere. Here, an oxide semiconductor containing In, Ga, and Zn isused as a target and sputtering is performed by a pulsed DC sputteringmethod under an atmosphere containing only oxygen, an atmospherecontaining oxygen at 90% or more and Ar at 10% or less so that the IGZOfilm contains oxygen as much as possible. Thus, an IGZO film containingexcessive oxygen is formed.

By thus successively forming the SiO_(x) film (x>0) containing excessiveoxygen and the IGZO film containing excessive oxygen without exposingthem to the air, an interface state between the films can be stabilizedbecause both the films contain excessive oxygen, and the reliability ofa TFT can be improved. If the substrate is exposed to the air beforeformation of the IGZO film, moisture or the like is attached and theinterface state is adversely affected, which may cause phenomena such asvariation in threshold voltage, degradation in electric characteristics,and a normally-on TFT. Moisture is a hydrogen compound. When the filmsare successively formed without being exposed to the air, the hydrogencompound can be prevented from existing at the interface. Therefore, bysuccessive film formation, variation in threshold voltage can bereduced, degradation in electric characteristics can be prevented, orshift of the TFT characteristics to the normally-on side can be reduced,desirably, the shift of the TFT characteristics can be prevented.

In addition, in the second treatment chamber 90 which is a sputteringchamber, both an artificial quartz target and an oxide semiconductortarget containing In, Ga, and Zn are placed, and the films aresuccessively formed by using a shutter; therefore, the films can bestacked in the same chamber. A shutter is provided between the targetand the substrate; a shutter is opened for a target which is deposited,and a target which is not deposited is shielded by a shutter. Advantagesof the process in which the films are stacked in the same chamber are asfollows: the number of chambers which are used can be reduced, andparticles or the like can be prevented from being attached to thesubstrate during transfer of the substrate between different chambers.

Next, the substrate is transferred to the transfer chamber 80 with thetransfer robot 81 by opening the gate valve 86 and transferred to afourth treatment chamber 92 by opening a gate valve 87 without beingexposed to the air, and then the gate valve 87 is closed.

Here, the fourth treatment chamber 92 is a sputtering chamber in whichsputtering is performed using an RF magnetron sputtering method. In thefourth treatment chamber 92, a silicon oxide film (SiO_(x) film (x>0))is formed as an insulating film to be a channel protective layer.Alternatively, for the channel protective layer, an aluminum oxide film(Al₂O₃ film), a magnesium oxide film (MgO_(x) film (x>0)), an aluminumnitride film (AlN_(x) film (x>0)), an yttrium oxide film (YO_(x) film(x>0)), or the like may be used instead of a silicon oxide film.

A small amount of a halogen element such as fluorine or chlorine may beadded to the channel protective layer so that movable ions such assodium ions can be immobilized. As a method for adding a small amount ofa halogen element, sputtering is performed by introducing a gascontaining a halogen element into the chamber. Note that in the casewhere a gas containing a halogen element is introduced, the evacuationmeans of the chamber is needed to be provided with an abatement system.The peak of the concentration of a halogen element to be contained inthe channel protective layer is measured by a secondary ion massspectrometer (SIMS) and is preferably in the range of from 1×10¹⁵ cm⁻³to 1×10²⁰ cm⁻³.

When the SiO_(x) film (x>0) is formed for the channel protective layer,a sputtering method in which artificial quartz is used as a target and arare gas, typically, argon is used, or a reactive sputtering method inwhich single crystal silicon is used as a target and chemically reactedwith an oxygen gas to obtain a SiO_(x) film (x>0) can be used. Here,artificial quartz is used as a target, and sputtering is performed in anatmosphere containing only oxygen, an atmosphere containing oxygen at90% or more and Ar at 10% or less so that a SiO_(x) (x>0) film containsoxygen as much as possible. Thus, a SiO_(x) film (x>0) containingexcessive oxygen is formed.

By thus successively forming the SiO_(x) film (x>0) containing excessiveoxygen and the IGZO film containing excessive oxygen without exposingthem to the air, an interface state between the films can be stabilizedbecause all the three films contain excessive oxygen, and thereliability of a TFT can be improved. If the substrate is exposed to theair before formation of the IGZO film, moisture or the like is attachedand the interface state is adversely affected, which may cause phenomenasuch as variation in threshold voltage, degradation in electriccharacteristics, and a normally-on TFT. Moisture is a hydrogen compound.When the films are successively formed without being exposed to the air,the hydrogen compound can be prevented from existing at the interface ofthe IGZO film. Therefore, by forming the three films successively,variation in threshold voltage can be reduced, degradation in electriccharacteristics can be prevented, or shift of the TFT characteristics ofa TFT to the normally-on side can be reduced, desirably, the shift ofthe TFT characteristics can be prevented.

In addition, in the second treatment chamber 90 which is a sputteringchamber, both an artificial quartz target and an oxide semiconductortarget containing In, Ga, and Zn are placed, and the three films aresuccessively formed by using a shutter; therefore, the films can bestacked in the same chamber. Advantages of the process in which thefilms are stacked in the same chamber are as follows: the number ofchambers which are used can be reduced, and particles or the like can beprevented from being attached to the substrate during transfer of thesubstrate between different chambers.

After the above steps for deposition on a substrate in a cassette caseare repeated so that a plurality of substrates are processed, the vacuumin the cassette chamber is released and the substrates and the cassettesare taken out.

Next, the channel protective layer is etched so that only a portionthereof overlapping with the gate electrode, that is, only a portionthereof overlapping with a portion to be a channel formation region ofthe IGZO film is left. Here, the channel protective layer is etchedunder the condition that the etching rate is sufficiently different fromthat of the IGZO film. In the case where there is not a sufficientdifference in etching rate between the channel protective layer and theIGZO film in etching the channel protective layer, the surface portionof the IGZO film is partially etched and thus a region thinner than aregion overlapped with the channel protective layer is formed in theIGZO film.

Next, the substrate is set in the cassette chamber of the multi-chambermanufacturing apparatus illustrated in FIG. 6 again.

Next, after pressure in the cassette chamber is reduced, the substrateis transferred to the transfer chamber 80 and then to the thirdtreatment chamber 91. Here, sputtering is performed by a pulsed DCsputtering method in an atmosphere containing only a rare gas, so thatthe film having n-type conductivity to be a buffer layer is formed. Thefilm having n-type conductivity functions as source and drain regions.

Next, the substrate is transferred to the transfer chamber 80 with thetransfer robot 81 by opening the gate valve 87 and transferred to afifth treatment chamber 93 by opening a gate valve 88 without beingexposed to the air, and then the gate valve 88 is closed.

Here, the fifth treatment chamber 93 is a sputtering chamber using a DCmagnetron sputtering method. In the fifth treatment chamber 93, a metalmultilayer film to be source and drain electrodes is formed. Thesputtering chamber of the fifth treatment chamber 93 is provided withboth a titanium target and an aluminum target and successive filmformation is performed by using a shutter; thus, films are formed in thesame chamber. Here, an aluminum film is stacked over a titanium film andfurther, a titanium film is stacked over the aluminum film.

By thus successively forming a film having n-type conductivity and ametal multilayer film without exposing them to the air, a favorableinterface state can be achieved and contact resistance can be reducedbetween the film having n-type conductivity and the metal multilayerfilm.

After the above steps for deposition on a substrate in a cassette caseare repeated so that a plurality of substrates are processed, the vacuumin the cassette chamber is released and the substrates and the cassettesare taken out.

Next, the metal multilayer film is selectively etched to form the sourceand drain electrodes. Further, the film having n-type conductivity andthe oxide semiconductor film containing In, Ga, and Zn are selectivelyetched using the source and drain electrodes as masks, so that sourceand drain regions and the semiconductor layer are formed. In the etchingof the film having n-type conductivity and the oxide semiconductor filmcontaining In, Ga, and Zn, the channel protective layer functions as anetching stopper. Further, in this embodiment, the gate insulating filmis a two-layer film in which the upper layer is a SiO_(x) (x>0) filmwhich may be removed, but the lower layer is a silicon nitride filmfunctioning as an etching stopper.

Through the above steps, the inverted-staggered thin film transistorincluding the channel protective layer can be formed.

Although an example is described in which the IGZO film containingexcessive oxygen and the film having n-type conductivity are formed inthe same chamber through the above steps, the present invention is notparticularly limited to this. Alternatively, the IGZO film containingexcessive oxygen and the film having n-type conductivity may be formedin different chambers.

In this embodiment, a multi-chamber manufacturing apparatus is shown asan example, but an in-line manufacturing apparatus in which sputteringchambers are connected in series may be used and successive filmformation may be performed without being exposed to the air.

The apparatus illustrated in FIG. 6 has a so-called face-down treatmentchamber in which the deposition target surface of the substrate facesdownward, but may also have a vertical placement treatment chamber inwhich a substrate is placed vertically. The vertical placement treatmentchamber has an advantage in that a footprint is smaller than that of aface-down treatment chamber and can be effectively used in the casewhere a large-area substrate which could be bent due to its weight isused.

Embodiment 5

In this embodiment, an example will be described below in which at leasta part of a driver circuit and a thin film transistor to be disposed ina pixel portion are formed over one substrate.

The thin film transistor to be disposed in the pixel portion is formedaccording to any of Embodiments 1 to 3. Further, the thin filmtransistor described in any of Embodiments 1 to 3 is an n-channel TFT,and thus a part of a driver circuit that can include an n-channel TFTamong driver circuits is formed over the same substrate as the thin filmtransistor of the pixel portion.

FIG. 7A illustrates an example of a block diagram of an active matrixliquid crystal display device. The display device illustrated in FIG. 7Aincludes, over a substrate 5300, a pixel portion 5301 including aplurality of pixels each provided with a display element; a scan linedriver circuit 5302 that selects each pixel; and a signal line drivercircuit 5303 that controls a video signal input to a selected pixel.

The pixel portion 5301 is connected to the signal line driver circuit5303 by a plurality of signal lines S1 to Sm (not illustrated) thatextend in a column direction from the signal line driver circuit 5303,and to the scan line driver circuit 5302 by a plurality of scan lines G1to Gn (not illustrated) that extend in a row direction from the scanline driver circuit 5302. The pixel portion 5301 includes a plurality ofpixels (not illustrated) arranged in matrix so as to correspond to thesignal lines S1 to Sm and the scan lines G1 to Gm. Each pixel isconnected to a signal line Sj (any one of the signal lines S1 to Sm) anda scan line Gi (any one of the scan lines G1 to Gn).

In addition, the thin film transistor described in any of Embodiments 1to 3 is an n-channel TFT, and a signal line driver circuit including then-channel TFT is described with reference to FIG. 8.

The signal line driver circuit illustrated in FIG. 8 includes a driverIC 5601, switch groups 5602_1 to 5602_M, a first wiring 5611, a secondwiring 5612, a third wiring 5613, and wirings 5621_1 to 5621_M. Each ofthe switch groups 5602_1 to 5602_M includes a first thin film transistor5603 a, a second thin film transistor 5603 b, and a third thin filmtransistor 5603 c.

The driver IC 5601 is connected to the first wiring 5611, the secondwiring 5612, the third wiring 5613, and the wirings 5621_1 to 5621_M.The switch groups 5602_1 to 5602_M are connected to the wirings 5621_1to 5621_M corresponding to the switch groups 5602_1 to 5602_M,respectively, and are each connected to the first wiring 5611, thesecond wiring 5612, and the third wiring 5613. Each of the wirings5621_1 to 5621_M is connected to three signal lines via the first thinfilm transistor 5603 a, the second thin film transistor 5603 b, and thethird thin film transistor 5603 c. For example, the wiring 5621_J of theJ-th column (one of the wirings 5621_1 to 5621_M) is connected to asignal line Sj−1, a signal line Sj, and a signal line Sj+1 via the firstthin film transistor 5603 a, the second thin film transistor 5603 b, andthe third thin film transistor 5603 c which are included in the switchgroup 5602_J.

Note that a signal is input to each of the first wiring 5611, the secondwiring 5612, and the third wiring 5613.

Note that the driver IC 5601 is desirably formed over a singlecrystalline substrate. The switch groups 5602_1 to 5602_M are desirablyformed over the same substrate as the pixel portion illustrated in anyof Embodiments 1 to 3. Therefore, the driver IC 5601 and the switchgroups 5602_1 to 5602_M are preferably connected via an FPC or the like.

Next, operation of the signal line driver circuit illustrated in FIG. 8is described with reference to a timing chart in FIG. 9. Note that thetiming chart in FIG. 9 shows the case where the scan line Gi of the i-throw is selected. A selection period of the scan line Gi of the i-th rowis divided into a first sub-selection period T1, a second sub-selectionperiod T2, and a third sub-selection period T3. In addition, the signalline driver circuit in FIG. 8 operates as in FIG. 9 even when a scanline of another row is selected.

Note that the timing chart in FIG. 9 shows the case where the wiring5621_J of the J-th column is connected to the signal line Sj−1, thesignal line Sj, and the signal line Sj+1 via the first thin filmtransistor 5603 a, the second thin film transistor 5603 b, and the thirdthin film transistor 5603 c.

The timing chart in FIG. 9 shows timing at which the scan line Gi of thei-th row is selected, timing 5703 a of on/off of the first thin filmtransistor 5603 a, timing 5703 b of on/off of the second thin filmtransistor 5603 b, timing 5703 c of on/off of the third thin filmtransistor 5603 c, and a signal 5721_J input to the wiring 5621_J of theJ-th column.

Note that in the first sub-selection period T1, the second sub-selectionperiod T2, and the third sub-selection period T3, different videosignals are input to the wirings 5621_1 to 5621_M. For example, a videosignal input to the wiring 5621_J in the first sub-selection period T1is input to the signal line Sj−1, a video signal input to the wiring5621_J in the second sub-selection period T2 is input to the signal lineSj, and a video signal input to the wiring 5621_J in the thirdsub-selection period T3 is input to the signal line Sj+1. In addition,in the first sub-selection period T1, the second sub-selection periodT2, and the third sub-selection period T3, the video signals input tothe wiring 5621_J are denoted by Data_j−1, Data_j, and Data_j+1.

As illustrated in FIG. 9, in the first sub-selection period T1, thefirst thin film transistor 5603 a is turned on, and the second thin filmtransistor 5603 b and the third thin film transistor 5603 c are turnedoff. At this time, Data_j−1 input to the wiring 5621_J is input to thesignal line Sj−1 via the first thin film transistor 5603 a. In thesecond sub-selection period T2, the second thin film transistor 5603 bis turned on, and the first thin film transistor 5603 a and the thirdthin film transistor 5603 c are turned off. At this time, Data_j inputto the wiring 5621_J is input to the signal line Sj via the second thinfilm transistor 5603 b. In the third sub-selection period T3, the thirdthin film transistor 5603 c is turned on, and the first thin filmtransistor 5603 a and the second thin film transistor 5603 b are turnedoff. At this time, Data_j+1 input to the wiring 5621_J is input to thesignal line Sj+1 via the third thin film transistor 5603 c.

As described above, in the signal line driver circuit in FIG. 8, bydividing one gate selection period into three, video signals can beinput to three signal lines from one wiring 5621 in one gate selectionperiod. Therefore, in the signal line driver circuit in FIG. 8, thenumber of connections of the substrate provided with the driver IC 5601and the substrate provided with the pixel portion can be approximately ⅓of the number of signal lines. The number of connections is reduced toapproximately ⅓ of the number of the signal lines, so that reliability,yield, and the like of the signal line driver circuit in FIG. 8 can beimproved.

Note that there are no particular limitations on the arrangement, thenumber, a driving method, and the like of the thin film transistors, aslong as one gate selection period can be divided into a plurality ofsub-selection periods and video signals can be input to a plurality ofsignal lines from one wiring in the respective sub-selection periods asillustrated in FIG. 8.

For example, when video signals are input to three or more signal linesfrom one wiring in each of three or more sub-selection periods, it isonly necessary to add a thin film transistor and a wiring forcontrolling the thin film transistor. Note that when one selectionperiod is divided into four or more sub-selection periods, onesub-selection period is shorter. Therefore, one selection period isdesirably divided into two or three sub-selection periods.

As another example, one selection period may be divided into a prechargeperiod Tp, the first sub-selection period T1, the second sub-selectionperiod T2, and the third sub-selection period T3 as illustrated in atiming chart in FIG. 10. The timing chart in FIG. 10 shows timing atwhich the scan line Gi of the i-th row is selected, timing 5803 a ofon/off of the first thin film transistor 5603 a, timing 5803 b of on/offof the second thin film transistor 5603 b, timing 5803 c of on/off ofthe third thin film transistor 5603 c, and a signal 5821_J input to thewiring 5621_J of the J-th column. As illustrated in FIG. 10, the firstthin film transistor 5603 a, the second thin film transistor 5603 b, andthe third thin film transistor 5603 c are tuned on in the prechargeperiod Tp. At this time, a precharge voltage Vp input to the wiring5621_J is input to each of the signal line Sj−1, the signal line Sj, andthe signal line Sj+1 via the first thin film transistor 5603 a, thesecond thin film transistor 5603 b, and the third thin film transistor5603 c. In the first sub-selection period T1, the first thin filmtransistor 5603 a is turned on, and the second thin film transistor 5603b and the third thin film transistor 5603 c are turned off. At thistime, Data_j−1 input to the wiring 5621_J is input to the signal lineSj−1 via the first thin film transistor 5603 a. In the secondsub-selection period T2, the second thin film transistor 5603 b isturned on, and the first thin film transistor 5603 a and the third thinfilm transistor 5603 c are turned off. At this time, Data_j input to thewiring 5621_J is input to the signal line Sj via the second thin filmtransistor 5603 b. In the third sub-selection period T3, the third thinfilm transistor 5603 c is turned on, and the first thin film transistor5603 a and the second thin film transistor 5603 b are turned off. Atthis time, Data_j+1 input to the wiring 5621_J is input to the signalline Sj+1 via the third thin film transistor 5603 c.

As described above, in the signal line driver circuit in FIG. 8 to whichthe timing chart in FIG. 10 is applied, the video signal can be writtento the pixel at high speed because the signal line can be precharged byproviding a precharge selection period before a sub-selection period.Note that portions in FIG. 10 which are similar to those of FIG. 9 aredenoted by common reference numerals and detailed description of theportions which are the same and portions which have similar functions isomitted.

Further, a structure of a scan line driver circuit is described. Thescan line driver circuit includes a shift register and a buffer.Additionally, the scan line driver circuit may include a level shifterin some cases. In the scan line driver circuit, when the clock signal(CLK) and the start pulse signal (SP) are input to the shift register, aselection signal is generated. The generated selection signal isbuffered and amplified by the buffer, and the resulting signal issupplied to a corresponding scan line. Gate electrodes of transistors inpixels of one line are connected to the scan line. Further, since thetransistors in the pixels of one line have to be turned on at the sametime, a buffer through which a large current can flow can be used.

One mode of a shift register which is used for a part of a scan linedriver circuit is described with reference to FIG. 11 and FIG. 12.

FIG. 11 illustrates a circuit configuration of a shift register. Theshift register illustrated in FIG. 11 includes a plurality of flip-flops(flip-flops 5701_1 to 5701 _(—) n). The shift register is operated withinput of a first clock signal, a second clock signal, a start pulsesignal, and a reset signal.

Connection relations of the shift register in FIG. 11 are described. Inthe i-th stage flip-flop 5701 _(—) i (any one of the flip-flops 5701_1to 5701 _(—) n) in the shift register of FIG. 11, a first wiring 5501illustrated in FIG. 12 is connected to a seventh wiring 5717 _(—) i−1; asecond wiring 5502 illustrated in FIG. 12 is connected to a seventhwiring 5717 _(—) i+1; a third wiring 5503 illustrated in FIG. 12 isconnected to a seventh wiring 5717 _(—) i; and a sixth wiring 5506illustrated in FIG. 12 is connected to a fifth wiring 5715.

Further, a fourth wiring 5504 illustrated in FIG. 12 is connected to asecond wiring 5712 in flip-flops of odd-numbered stages, and isconnected to a third wiring 5713 in flip-flops of even-numbered stages.A fifth wiring 5505 illustrated in FIG. 12 is connected to a fourthwiring 5714.

Note that the first wiring 5501 in FIG. 12 of the first stage flip-flop5701_1 is connected to a first wiring 5711. Moreover, the second wiring5502 in FIG. 12 of the n-th stage flip-flop 5701 _(—) n is connected toa sixth wiring 5716.

Note that the first wiring 5711, the second wiring 5712, the thirdwiring 5713, and the sixth wiring 5716 may be referred to as a firstsignal line, a second signal line, a third signal line, and a fourthsignal line, respectively. The fourth wiring 5714 and the fifth wiring5715 may be referred to as a first power supply line and a second powersupply line, respectively.

Next, FIG. 12 illustrates details of the flip-flop illustrated in FIG.11. The flip-flop illustrated in FIG. 12 includes a first thin filmtransistor 5571, a second thin film transistor 5572, a third thin filmtransistor 5573, a fourth thin film transistor 5574, a fifth thin filmtransistor 5575, a sixth thin film transistor 5576, a seventh thin filmtransistor 5577, and an eighth thin film transistor 5578. Note that eachof the first thin film transistor 5571, the second thin film transistor5572, the third thin film transistor 5573, the fourth thin filmtransistor 5574, the fifth thin film transistor 5575, the sixth thinfilm transistor 5576, the seventh thin film transistor 5577, and theeighth thin film transistor 5578 is an n-channel transistor and isturned on when the gate-source voltage (V_(gs)) exceeds the thresholdvoltage (V_(th)).

Next, connection structures of the flip-flop illustrated in FIG. 11 aredescribed below.

A first electrode (one of a source electrode and a drain electrode) ofthe first thin film transistor 5571 is connected to the fourth wiring5504. A second electrode (the other of the source electrode and thedrain electrode) of the first thin film transistor 5571 is connected tothe third wiring 5503.

A first electrode of the second thin film transistor 5572 is connectedto the sixth wiring 5506. A second electrode of the second thin filmtransistor 5572 is connected to the third wiring 5503.

A first electrode of the third thin film transistor 5573 is connected tothe fifth wiring 5505. A second electrode of the third thin filmtransistor 5573 is connected to the gate electrode of the second thinfilm transistor 5572. A gate electrode of the third thin film transistor5573 is connected to the fifth wiring 5505.

A first electrode of the fourth thin film transistor 5574 is connectedto the sixth wiring 5506. A second electrode of the fourth thin filmtransistor 5574 is connected to the gate electrode of the second thinfilm transistor 5572. A gate electrode of the fourth thin filmtransistor 5574 is connected to a gate electrode of the first thin filmtransistor 5571.

A first electrode of the fifth thin film transistor 5575 is connected tothe fifth wiring 5505. A second electrode of the fifth thin filmtransistor 5575 is connected to the gate electrode of the first thinfilm transistor 5571. A gate electrode of the fifth thin film transistor5575 is connected to the first wiring 5501.

A first electrode of the sixth thin film transistor 5576 is connected tothe sixth wiring 5506. A second electrode of the sixth thin filmtransistor 5576 is connected to the gate electrode of the first thinfilm transistor 5571. A gate electrode of the sixth thin film transistor5576 is connected to a gate electrode of the second thin film transistor5572.

A first electrode of the seventh thin film transistor 5577 is connectedto the sixth wiring 5506. A second electrode of the seventh thin filmtransistor 5577 is connected to a gate electrode of the first thin filmtransistor 5571. A gate electrode of the seventh thin film transistor5577 is connected to the second wiring 5502. A first electrode of theeighth thin film transistor 5578 is connected to the sixth wiring 5506.A second electrode of the eighth thin film transistor 5578 is connectedto the gate electrode of the second thin film transistor 5572. A gateelectrode of the eighth thin film transistor 5578 is connected to thefirst wiring 5501.

Note that the points at which the gate electrode of the first thin filmtransistor 5571, the gate electrode of the fourth thin film transistor5574, the second electrode of the fifth thin film transistor 5575, thesecond electrode of the sixth thin film transistor 5576, and the secondelectrode of the seventh thin film transistor 5577 are connected areeach referred to as a node 5543. The points at which the gate electrodeof the second thin film transistor 5572, the second electrode of thethird thin film transistor 5573, the second electrode of the fourth thinfilm transistor 5574, the gate electrode of the sixth thin filmtransistor 5576, and the second electrode of the eighth thin filmtransistor 5578 are connected are each referred to as a node 5544.

Note that the first wiring 5501, the second wiring 5502, the thirdwiring 5503, and the fourth wiring 5504 may be referred to as a firstsignal line, a second signal line, a third signal line, and a fourthsignal line, respectively. The fifth wiring 5505 and the sixth wiring5506 may be referred to as a first power supply line and a second powersupply line, respectively.

In addition, the signal line driver circuit and the scan line drivercircuit can be formed using only the n-channel TFTs described in any ofEmbodiments 1 to 3. The n-channel TFT described in any of Embodiments 1to 3 has a high mobility, and thus a driving frequency of a drivercircuit can be increased. Further, in the case of the n-channel TFTdescribed in any of Embodiments 1 to 3, since parasitic capacitance isreduced by a buffer layer, frequency characteristics (also referred toas f characteristics) are excellent. For example, a scan line drivercircuit using the n-channel TFT described in any of Embodiments 1 to 3can be operated at high speed, and thus a frame frequency can beincreased and insertion of black images can be realized.

In addition, when the channel width of the transistor in the scan linedriver circuit is increased or a plurality of scan line driver circuitsare provided, for example, higher frame frequency can be realized. Whena plurality of scan line driver circuits are provided, a scan linedriver circuit for driving even-numbered scan lines is provided on oneside and a scan line driver circuit for driving odd-numbered scan linesis provided on the opposite side; thus, increase in frame frequency canbe realized.

Further, when an active matrix light-emitting display device ismanufactured, a plurality of thin film transistors are arranged in atleast one pixel, and thus a plurality of scan line driver circuits arepreferably arranged. FIG. 7B is a block diagram illustrating an exampleof an active matrix light-emitting display device.

The display device illustrated in FIG. 7B includes, over a substrate5400, a pixel portion 5401 having a plurality of pixels each providedwith a display element, a first scan line driver circuit 5402 and asecond scan line driver circuit 5404 that select a pixel, and a signalline driver circuit 5403 that controls input of a video signal to theselected pixel.

When the video signal input to a pixel of the display device illustratedin FIG. 7B is a digital signal, the pixel emits or does not emit lightby switching of on/off of a transistor. Thus, grayscale can be displayedusing an area ratio grayscale method or a time ratio grayscale method.An area ratio grayscale method refers to a driving method by which onepixel is divided into a plurality of subpixels and the subpixels aredriven independently based on video signals so that grayscale isdisplayed. Further, a time ratio grayscale method refers to a drivingmethod by which a period during which a pixel is in a light-emittingstate is controlled so that grayscale is displayed.

Since the response speed of light-emitting elements is higher than thatof liquid crystal elements or the like, the light-emitting elements aremore suitable for a time ratio grayscale method than the liquid crystalelements. Specifically, in the case of performing display with a timegray scale method, one frame period is divided into a plurality ofsubframe periods. Then, in accordance with video signals, thelight-emitting element in the pixel is set in a light-emitting state ora non-light-emitting state in each subframe period. By dividing oneframe period into a plurality of subframe periods, the total length oftime, in which pixels actually emit light in one frame period, can becontrolled with video signals so that gray scales can be displayed.

In the example of the display device illustrated in FIG. 7B, in the casewhere two TFTs of a switching TFT and a current control TFT are arrangedin one pixel, the first scan line driver circuit 5402 generates a signalwhich is input to a first scan line serving as a gate wiring of theswitching TFT, and the second scan line driver circuit 5404 generates asignal which is input to a second scan line serving as a gate wiring ofthe current control TFT; however, one scan line driver circuit maygenerate both the signal which is input to the first scan line and thesignal which is input to the second scan line. In addition, for example,there is a possibility that a plurality of the first scan lines used forcontrolling the operation of the switching element are provided in eachpixel, depending on the number of transistors included in the switchingelement. In that case, one scan line driver circuit may generate allsignals that are input to the plurality of first scan lines, or aplurality of scan line driver circuits may generate signals that areinput to the plurality of first scan lines.

In addition, also in the light-emitting device, a part of the drivercircuit that can include n-channel TFTs among driver circuits can beformed over the same substrate as the thin film transistors of the pixelportion. Alternatively, the signal line driver circuit and the scan linedriver circuit can be formed using only the n-channel TFTs described inany of Embodiments 1 to 3.

Moreover, the above-described driver circuit can be used for electronicpaper that drives electronic ink using an element electrically connectedto a switching element, without being limited to applications to aliquid crystal display device or a light-emitting device. Electronicpaper is also referred to as an electrophoretic display device(electrophoretic display) and has advantages in that it has the samelevel of readability as plain paper, it has lower power consumption thanother display devices, and it can be made thin and lightweight.

Electrophoretic displays can have various modes. An electrophoreticdisplay contains a plurality of microcapsules dispersed in a solvent ora solute, each of which contains first particles which arepositive-charged and second particles which are negative-charged. Byapplying an electric field to the microcapsules, the particles in themicrocapsules are moved in opposite directions to each other and onlythe color of the particles concentrated on one side is exhibited. Notethat the first particles and the second particles each contain a pigmentand do not move without an electric field. Moreover, the colors of thefirst particles and the second particles are different from each other(the colors include achromatic color).

In this way, an electrophoretic display is a display that utilizes aso-called dielectrophoretic effect by which a substance that has a highdielectric constant moves to a high-electric field region. Anelectrophoretic display does not need to use a polarizing plate and acounter substrate, which are required in a liquid crystal displaydevice, and both the thickness and weight of the electrophoretic displaydevice can be half of those of a liquid crystal display device.

A solution in which the aforementioned microcapsules are dispersedthroughout a solvent is referred to as electronic ink. This electronicink can be printed on a surface of glass, plastic, cloth, paper, or thelike. Furthermore, with the use of a color filter or particles eachcontaining a pigment, color display is possible, as well.

In addition, if a plurality of the aforementioned microcapsules arearranged as appropriate over an active matrix substrate so as to beinterposed between two electrodes, an active matrix display device canbe completed, and display can be performed by application of an electricfield to the microcapsules. For example, the active matrix substrateobtained in Embodiment 2 can be used.

Note that the first particles and the second particles in themicrocapsules may each be formed using a single material selected from aconductive material, an insulating material, a semiconductor material, amagnetic material, a liquid crystal material, a ferroelectric material,an electroluminescent material, an electrochromic material, or amagnetophoretic material or formed of a composite material of any ofthese.

Embodiment 6

A thin film transistor to which an embodiment of the present inventionis applied is manufactured, and a semiconductor device having a displayfunction (also referred to as a display device) can be manufacturedusing the thin film transistor for a pixel portion and further for adriver circuit. Further, part or whole of a driver circuit can be formedover the same substrate as a pixel portion, using a thin film transistorto which an embodiment of the present invention is applied, whereby asystem-on-panel can be obtained.

The display device includes a display element. As the display element, aliquid crystal element (also referred to as a liquid crystal displayelement) or a light-emitting element (also referred to as alight-emitting display element) can be used. Light-emitting elementsinclude, in its category, an element whose luminance is controlled by acurrent or a voltage, and specifically include an inorganicelectroluminescent (EL) element, an organic EL element, and the like.Further, a display medium whose contrast is changed by an electriceffect, such as an electronic ink, can be used.

In addition, the display device includes a panel in which the displayelement is sealed, and a module in which an IC including a controller orthe like is mounted on the panel. The present invention relates to onemode of an element substrate before the display element is completed ina manufacturing process of the display device, and the element substrateis provided with a means for supplying a current to the display elementin each of a plurality of pixels. Specifically, the element substratemay be in a state provided with only a pixel electrode of the displayelement, a state after a conductive film to be a pixel electrode isformed and before the conductive film is etched to form the pixelelectrode, or any of other states.

Note that a display device in this specification means an image displaydevice, a display device, or a light source (including a lightingdevice). Further, the display device includes any of the followingmodules in its category: a module to which a connector such as aflexible printed circuit (FPC), tape automated bonding (TAB) tape, or atape carrier package (TCP) is attached; a module having TAB tape or aTCP which is provided with a printed wiring board at the end thereof;and a module having an integrated circuit (IC) which is directly mountedon a display element by a chip on glass (COG) method.

In this embodiment, a liquid crystal display device will be described asan example of a semiconductor device to which an embodiment of thepresent invention is applied.

FIGS. 13A and 13B illustrate an active-matrix liquid crystal displaydevice to which an embodiment of the present invention is applied. FIG.13A is a plane view of the liquid crystal display device. FIG. 13B is across-sectional view taken along a line V-X in FIG. 13A. A thin filmtransistor 201 used in the semiconductor device can be manufacturedsimilarly to the thin film transistor described in Embodiment 3 and is ahighly reliable thin film transistor including an IGZO semiconductorlayer and a buffer layer having n-type conductivity. The thin filmtransistors described in Embodiment 1 or 2 can also be used as the thinfilm transistor 201 of this embodiment.

The liquid crystal display device of this embodiment in FIG. 13Aincludes a source wiring layer 202, an inverted-staggered thin filmtransistor 201 with a multi-gate structure, a gate wiring layer 203, anda capacitor wiring layer 204.

Further, in FIG. 13B, in the liquid crystal display device of thisembodiment, a substrate 200 provided with the thin film transistor 201with a multi-gate structure, an insulating layer 211, an insulatinglayer 212, an insulating layer 213, an electrode layer 255 used for adisplay element, an insulating layer 261 serving as an alignment film,and a polarizing plate 268 and a substrate 266 provided with aninsulating layer 263 serving as an alignment film, an electrode layer265 used for a display element, a coloring layer 264 serving as a colorfilter, and a polarizing plate 267 face to each other with a liquidcrystal layer 262 interposed therebetween; thus, a liquid crystaldisplay element 260 is formed.

Although FIGS. 13A and 13B illustrate an example of a transmissiveliquid crystal display device, an embodiment of the present inventioncan also be applied to a reflective liquid crystal display device and atransflective liquid crystal display device.

While FIGS. 13A and 13B illustrate an example of the liquid crystaldisplay device in which the polarizing plate 267 is provided in aposition outer than the substrate 266 (on the viewer side) and thecoloring layer 264 and the electrode layer 265 used for a displayelement are provided in a position inner than the substrate 266 in thatorder, the polarizing plate 267 may be provided in a position inner thanthe substrate 266. The layered structure of the polarizing plate and thecoloring layer is not limited to that shown in FIGS. 13A and 13B and maybe set as appropriate depending on materials of the polarizing plate andthe coloring layer or conditions of manufacturing steps. Further, alight-blocking film serving as a black matrix may be provided.

The electrode layers 255 and 265 each serving as a pixel electrode layercan be formed using a light-transmitting conductive material such asindium oxide containing tungsten oxide, indium zinc oxide containingtungsten oxide, indium oxide containing titanium oxide, indium tin oxidecontaining titanium oxide, indium tin oxide (hereinafter referred to asITO), indium zinc oxide, or indium tin oxide to which silicon oxide isadded.

A conductive composition containing a conductive high molecule (alsoreferred to as a conductive polymer) can be used for the electrodelayers 255 and 265. The pixel electrode formed using the conductivecomposition preferably has a sheet resistivity of 10000 Ω/square or lessand a transmittance of 70% or more at a wavelength of 550 nm. Further,the resistivity of the conductive high molecule contained in theconductive composition is preferably 0.1 Ω·cm or less.

As the conductive high molecule, a so-called π-electron conjugatedconductive polymer can be used. For example, polyaniline or a derivativethereof, polypyrrole or a derivative thereof, polythiophene or aderivative thereof, a copolymer of two or more kinds of them, and thelike can be given.

Through the above process, a highly reliable liquid crystal displaydevice as a semiconductor device can be manufactured.

This embodiment can be implemented by being combined with any of thestructures described in other embodiments, as appropriate.

Embodiment 7

In this embodiment, an example of electronic paper will be described asa semiconductor device to which an embodiment of the present inventionis applied.

FIG. 14 illustrates active matrix electronic paper as an example of asemiconductor device to which an embodiment of the present invention isapplied. A thin film transistor 581 used for the semiconductor devicecan be manufactured similarly to the thin film transistor described inEmbodiment 3 and is a highly reliable thin film transistor including anIGZO semiconductor layer and a buffer layer having n-type conductivity.Alternatively, the thin film transistors described in Embodiment 1 or 2may be used as the thin film transistor 581 of this embodiment.

The electronic paper in FIG. 14 is an example of a display device usinga twisting ball display system. The twisting ball display system refersto a method in which spherical particles each colored in black and whiteare arranged between a first electrode layer and a second electrodelayer which are electrode layers used for a display element, and apotential difference is generated between the first electrode layer andthe second electrode layer to control orientation of the sphericalparticles, so that display is performed.

The thin film transistor 581 is an inverted-staggered thin filmtransistor with a multi-gate structure, and a source electrode layer anda drain electrode layer thereof are in contact with a first electrodelayer 587 at an opening formed in an insulating layer 585, whereby thethin film transistor 581 is electrically connected to the firstelectrode layer 587. Between the first electrode layer 587 and a secondelectrode layer 588, spherical particles 589 each having a black region590 a, a white region 590 b, and a cavity 594 around the regions, whichis filled with liquid, are provided. A space around the sphericalparticles 589 is filled with a filler 595 such as a resin (see FIG. 14).

In FIG. 14, an electrode layer containing a light-transmittingconductive high molecule is used as the first electrode layer. Aninorganic insulating film is provided over the first electrode layer587. The inorganic insulating film serves as a barrier film whichprevents ionic impurities from diffusing from the first electrode layer587.

Further, instead of the twisting ball, an electrophoretic element may beused. A microcapsule having a diameter of about 10 μm to 200 μm in whichtransparent liquid, positively charged white microparticles, andnegatively charged black microparticles are encapsulated, is used. Inthe microcapsule which is provided between the first electrode layer andthe second electrode layer, when an electric field is applied by thefirst electrode layer and the second electrode layer, the whitemicroparticles and black microparticles move to opposite sides from eachother, so that white or black can be displayed. A display element usingthis principle is an electrophoretic display element and is calledelectronic paper in general. The electrophoretic display element hashigher reflectance than a liquid crystal display element and thus, anauxiliary light is unnecessary, power consumption is low, and a displayportion can be recognized in a dim place. In addition, even when poweris not supplied to the display portion, an image which has beendisplayed once can be maintained. Accordingly, a displayed image can bestored even if a semiconductor device having a display function (whichmay be referred to as a display device simply or a semiconductor deviceprovided with a display device) is distanced from an electric wavesource.

Through the above process, highly reliable electronic paper as asemiconductor device can be manufactured.

This embodiment can be implemented by being combined with any of thestructures described in other embodiments, as appropriate.

Embodiment 8

In this embodiment, an example of a light-emitting display device willbe described as a semiconductor device to which an embodiment of thepresent invention is applied. As a display element included in a displaydevice, a light-emitting element utilizing electroluminescence isdescribed here. Light-emitting elements utilizing electroluminescenceare classified according to whether a light-emitting material is anorganic compound or an inorganic compound. In general, the former isreferred to as an organic EL element, and the latter is referred to asan inorganic EL element.

In an organic EL element, by application of a voltage to alight-emitting element, electrons and holes are separately injected froma pair of electrodes into a layer containing a light-emitting organiccompound, and a current flows. The carriers (electrons and holes) arerecombined and thus, the light-emitting organic compound is excited. Thelight-emitting organic compound returns to a ground state from theexcited state, thereby emitting light. Owing to such a mechanism, thislight-emitting element is referred to as a current-excitationlight-emitting element.

The inorganic EL elements are classified according to their elementstructures into a dispersion-type inorganic EL element and a thin-filminorganic EL element. A dispersion-type inorganic EL element has alight-emitting layer where particles of a light-emitting material aredispersed in a binder, and its light emission mechanism isdonor-acceptor recombination type light emission that utilizes a donorlevel and an acceptor level. A thin-film inorganic EL element has astructure where a light-emitting layer is sandwiched between dielectriclayers, which are further sandwiched between electrodes, and its lightemission mechanism is localized type light emission that utilizesinner-shell electron transition of metal ions. Note that description ismade here using an organic EL element as a light-emitting element.

FIGS. 15A and 15B illustrate an active-matrix light-emitting displaydevice as an example of a semiconductor device to which an embodiment ofthe present invention is applied. FIG. 15A is a plane view of thelight-emitting display device, and FIG. 15B is a cross-sectional viewtaken along a line Y-Z in FIG. 15A. Note that FIG. 16 illustrates anequivalent circuit of the light-emitting display device illustrated inFIGS. 15A and 15B.

Thin film transistors 301 and 302 used for a semiconductor device can bemanufactured similarly to any of the thin film transistors described inEmbodiments 1 and 3 and are highly reliable thin film transistors eachincluding an IGZO semiconductor layer and a buffer layer formed using alayer having n-type conductivity. Alternatively, the thin filmtransistors described in Embodiment 2 may be used as the thin filmtransistors 301 and 302 of this embodiment.

The light-emitting display device of this embodiment illustrated in FIG.15A and FIG. 16 includes the thin film transistors 301 and 302 with amulti-gate structure, a light-emitting element 303, a capacitor element304, a source wiring layer 305, a gate wiring layer 306, and a powersupply line 307. The thin film transistors 301 and 302 are n-channelthin film transistors.

In FIG. 15B, the light-emitting display device of this embodimentincludes the thin film transistor 302; an insulating layer 311; aninsulating layer 312; an insulating layer 313; a partition wall 321; anda first electrode layer 320, an electroluminescent layer 322, and asecond electrode layer 323 which are used for the light-emitting element324.

The insulating layer 313 is preferably formed using an organic resinsuch as acrylic, polyimide, or polyamide or using siloxane.

Since the thin film transistor 302 in the pixel is n-type in thisembodiment, a cathode is desirably used as the first electrode layer 320which is a pixel electrode layer. Specifically, for the cathode, amaterial with a low work function such as Ca, Al, CaF, MgAg, or AlLi canbe used.

The partition wall 321 is formed using an organic resin film, aninorganic insulating film, or organic polysiloxane. It is particularlypreferable that the partition wall 321 be formed using a photosensitivematerial and an opening be formed over the first electrode layer 320 sothat a sidewall of the opening is formed as an inclined surface withcontinuous curvature.

The electroluminescent layer 322 may be formed using a single layer or aplurality of layers stacked.

The second electrode layer 323 is formed as an anode to cover theelectroluminescent layer 322. The second electrode layer 323 can beformed using a light-transmitting conductive film using any of thelight-transmitting conductive materials listed in Embodiment 7 for thepixel electrode layer. The second electrode layer 323 may be formedusing a titanium nitride film or a titanium film instead of theabove-described light-transmitting conductive film. The light-emittingelement 324 is formed by overlapping of the first electrode layer 320,the electroluminescent layer 322, and the second electrode layer 323.After that, a protective film may be formed over the second electrodelayer 323 and the partition wall 321 in order to prevent entry ofoxygen, hydrogen, moisture, carbon dioxide, or the like into thelight-emitting element 324. As the protective film, a silicon nitridefilm, a silicon nitride oxide film, a DLC film, or the like can beformed.

Further, in a practical case, it is preferable that a display devicecompleted up to the state illustrated in FIG. 15B be packaged (sealed)with a protective film (such as a laminate film or an ultravioletcurable resin film) or a cover material with high air-tightness andlittle degasification so that the display device is not exposed to theoutside air.

Next, structures of the light-emitting element will be described withreference to FIGS. 17A to 17C. A cross-sectional structure of a pixelwill be described by taking an n-type driving TFT as an example. DrivingTFTs 7001, 7011, and 7021 used for the semiconductor devices illustratedin FIGS. 17A to 17C can be manufactured similarly to the thin filmtransistor described in Embodiment 1 and are highly reliable thin filmtransistors each having an IGZO semiconductor layer and a buffer layerhaving n-type conductivity. Alternatively, the thin film transistorsdescribed in Embodiment 2 or 3 can be used as the driving TFTs 7001,7011, and 7021.

In order to extract light emitted from the light-emitting element, atleast one of the anode and the cathode is required to transmit light. Athin film transistor and a light-emitting element are formed over asubstrate. A light-emitting element can have a top emission structure,in which light emission is extracted through the surface opposite to thesubstrate; a bottom emission structure, in which light emission isextracted through the surface on the substrate side; or a dual emissionstructure, in which light emission is extracted through the surfaceopposite to the substrate and the surface on the substrate side. Thepixel structure to which an embodiment of the present invention isapplied can be applied to a light-emitting element having any of theseemission structures.

A light-emitting element having a top emission structure will bedescribed with reference to FIG. 17A.

FIG. 17A is a cross-sectional view of a pixel in the case where thedriving TFT 7001 is of an n-type TFT and light is emitted from alight-emitting element 7002 to an anode 7005 side. In FIG. 17A, acathode 7003 of the light-emitting element 7002 is electricallyconnected to the driving TFT 7001, and a light-emitting layer 7004 andthe anode 7005 are stacked in this order over the cathode 7003. Thecathode 7003 can be formed using any of a variety of conductivematerials as long as it has a low work function and reflect light. Forexample, Ca, Al, CaF, MgAg, AlLi, or the like is desirably used. Thelight-emitting layer 7004 may be formed using a single layer or aplurality of layers stacked. When the light-emitting layer 7004 isformed using a plurality of layers, the light-emitting layer 7004 isformed by stacking an electron-injecting layer, an electron-transportinglayer, a light-emitting layer, a hole-transporting layer, and ahole-injecting layer in this order over the cathode 7003. Note that itis not necessary to form all of these layers. The anode 7005 is formedusing a light-transmitting conductive film such as a film of indiumoxide containing tungsten oxide, indium zinc oxide containing tungstenoxide, indium oxide containing titanium oxide, indium tin oxidecontaining titanium oxide, indium tin oxide (hereinafter referred to asITO), indium zinc oxide, or indium tin oxide to which silicon oxide isadded.

The light-emitting element 7002 corresponds to a region where thecathode 7003 and the anode 7005 sandwich the light-emitting layer 7004.In the case of the pixel illustrated in FIG. 17A, light is emitted fromthe light-emitting element 7002 to the anode 7005 side as indicated byan arrow.

Next, a light-emitting element having a bottom emission structure willbe described with reference to FIG. 17B. FIG. 17B is a cross-sectionalview of a pixel in the case where the driving TFT 7011 is of an n-typeand light is emitted from a light-emitting element 7012 to a cathode7013 side. In FIG. 17B, the cathode 7013 of the light-emitting element7012 is formed over a light-transmitting conductive film 7017 that iselectrically connected to the driving TFT 7011, and a light-emittinglayer 7014 and an anode 7015 are stacked in this order over the cathode7013. Note that a light-blocking film 7016 for reflecting or blockinglight may be formed to cover the anode 7015 when the anode 7015 has alight-transmitting property. For the cathode 7013, various materials canbe used as in the case of FIG. 17A as long as they are conductivematerials having a low work function. Note that the cathode 7013 isformed to have a thickness that can transmit light (preferably,approximately 5 nm to 30 nm). For example, an aluminum film with athickness of 20 nm can be used as the cathode 7013. In a similar mannerto the case of FIG. 17A, the light-emitting layer 7014 may be formedusing either a single layer or a plurality of layers stacked. The anode7015 is not required to transmit light, but can be formed using alight-transmitting conductive material as in the case of FIG. 17A. Asthe light-blocking film 7016, a metal or the like that reflects lightcan be used for example; however, it is not limited to a metal film. Forexample, a resin or the like to which black pigments are added mayalternatively be used.

The light-emitting element 7012 corresponds to a region where thecathode 7013 and the anode 7015 sandwich the light-emitting layer 7014.In the case of the pixel illustrated in FIG. 17B, light is emitted fromthe light-emitting element 7012 to the cathode 7013 side as indicated byan arrow.

Next, a light-emitting element having a dual emission structure will bedescribed with reference to FIG. 17C. In FIG. 17C, a cathode 7023 of alight-emitting element 7022 is formed over a light-transmittingconductive film 7027 which is electrically connected to the driving TFT7021, and a light-emitting layer 7024 and an anode 7025 are stacked inthis order over the cathode 7023. As in the case of FIG. 17A, thecathode 7023 can be formed using any of a variety of conductivematerials as long as it has a low work function. Note that the cathode7023 is formed to have a thickness that can transmit light. For example,a film of Al having a thickness of 20 nm can be used as the cathode7023. As in FIG. 17A, the light-emitting layer 7024 may be formed usingeither a single layer or a plurality of layers stacked. The anode 7025can be formed using a light-transmitting conductive material as in thecase of FIG. 17A.

The light-emitting element 7022 corresponds to a region where thecathode 7023, the light-emitting layer 7024, and the anode 7025 overlapwith one another. In the case of the pixel illustrated in FIG. 17C,light is emitted from the light-emitting element 7022 to both the anode7025 side and the cathode 7023 side as indicated by arrows.

Note that, although an organic EL element is described here as alight-emitting element, an inorganic EL element can alternatively beprovided as a light-emitting element.

In this embodiment, the example is described in which a thin filmtransistor (a driving TFT) which controls the driving of alight-emitting element is electrically connected to the light-emittingelement; however, a structure may be employed in which a TFT for currentcontrol is connected between the driving TFT and the light-emittingelement.

A semiconductor device described in this embodiment is not limited tothe structures illustrated in FIGS. 17A to 17C and can be modified invarious ways based on the spirit of techniques according to the presentinvention.

Through the above process, a highly reliable light-emitting displaydevice as a semiconductor device can be manufactured.

This embodiment can be implemented by being combined with any of thestructures described in other embodiments, as appropriate.

Embodiment 9

Next, a structure of a display panel mounted with a semiconductor deviceto which an embodiment of the present invention is applied will bedescribed below. In this embodiment, a liquid crystal display panel(also referred to as a liquid crystal panel), which is an embodiment ofa liquid crystal display device having a liquid crystal element as adisplay element, and a light-emitting display panel (also referred to asa light-emitting panel), which is an embodiment of a semiconductordevice having a light-emitting element as a display element, will bedescribed.

Next, the appearance and a cross section of a light-emitting displaypanel mounted with the semiconductor device to which an embodiment ofthe present invention is applied will be described with reference toFIGS. 18A and 18B. FIG. 18A is a top view of a panel in which a highlyreliable thin film transistor including an IGZO semiconductor layer anda buffer layer having n-type conductivity and a light-emitting elementare sealed between a first substrate and a second substrate with asealant. FIG. 18B is a cross-sectional view taken along a line H-I inFIG. 18A.

A sealant 4505 is provided so as to surround a pixel portion 4502,signal line driver circuits 4503 a and 4503 b, and scan line drivercircuits 4504 a and 4504 b which are provided over a first substrate4501. In addition, a second substrate 4506 is provided over the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b. Accordingly, the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b are sealed together with afiller 4507, by the first substrate 4501, the sealant 4505, and thesecond substrate 4506.

The pixel portion 4502, the signal line driver circuits 4503 a and 4503b, and the scan line driver circuits 4504 a and 4504 b which are formedover the first substrate 4501 each include a plurality of thin filmtransistors, and a thin film transistor 4510 included in the pixelportion 4502 and a thin film transistor 4509 included in the signal linedriver circuit 4503 a are illustrated as an example in FIG. 18B.

Each of the thin film transistors 4509 and 4510 corresponds to a thinfilm transistor including an IGZO semiconductor layer and a buffer layerhaving n-type conductivity, and the thin film transistors described inany one of Embodiments 1, 2, and 3 can be used as the thin filmtransistors 4509 and 4510. In this embodiment, the thin film transistors4509 and 4510 are n-channel thin film transistors.

Moreover, reference numeral 4511 denotes a light-emitting element. Afirst electrode layer 4517 which is a pixel electrode included in thelight-emitting element 4511 is electrically connected to a sourceelectrode layer or a drain electrode layer of the thin film transistor4510. Note that the structure of the light-emitting element 4511 is notlimited to that described in this embodiment. The structure of thelight-emitting element 4511 can be changed as appropriate depending onthe direction in which light is extracted from the light-emittingelement 4511, or the like.

In addition, a variety of signals and a potential are supplied to thesignal line driver circuits 4503 a and 4503 b, the scan line drivercircuits 4504 a and 4504 b, or the pixel portion 4502 from FPCs 4518 aand 4518 b.

In this embodiment, a wiring 4516 is formed using the same material asthat of the source electrode layer or the drain electrode layer. Thewiring 4516 is connected to the pixel portion 4502, the signal linedriver circuits 4503 a and 4503 b, or the scan line driver circuits 4504a and 4504 b through a contact hole (not illustrated) provided in aninsulating film that covers the thin film transistors 4509 and 4510. Inaddition, a connection terminal 4515 is formed over the wiring 4516 thatis provided over an edge portion of the first substrate 4501, by usingthe same material as that of the first electrode layer 4517.

The connection terminal 4515 is electrically connected to a terminalincluded in the FPC 4518 a through an anisotropic conductive film 4519.

The second substrate 4506 located in the direction in which light isextracted from the light-emitting element 4511 needs to have alight-transmitting property. In that case, a light-transmitting materialsuch as a glass plate, a plastic plate, a polyester film, or an acrylicfilm is used.

As the filler 4507, an ultraviolet curable resin or a thermosettingresin can be used, instead of an inert gas such as nitrogen or argon.For example, PVC (polyvinyl chloride), acrylic, polyimide, an epoxyresin, a silicone resin, PVB (polyvinyl butyral), or EVA (ethylene vinylacetate) can be used. In this embodiment, nitrogen is used for thefiller.

In addition, if needed, an optical film, such as a polarizing plate, acircularly polarizing plate (including an elliptically polarizingplate), a retardation plate (a quarter-wave plate or a half-wave plate),or a color filter, may be provided as appropriate on a light-emittingsurface of the light-emitting element. Further, the polarizing plate orthe circularly polarizing plate may be provided with an anti-reflectionfilm. For example, anti-glare treatment by which reflected light can bediffused by projections and depressions on the surface so as to reducethe glare can be performed.

Driver circuits formed using a single crystal semiconductor film orpolycrystalline semiconductor film over a substrate separately preparedmay be mounted as the signal line driver circuits 4503 a and 4503 b andthe scan line driver circuits 4504 a and 4504 b. Alternatively, only thesignal line driver circuits or part thereof, or the scan line drivercircuits or part thereof may be separately formed and mounted. Thisembodiment is not limited to the structure illustrated in FIGS. 18A and18B.

Next, the appearance and a cross section of a liquid crystal displaypanel mounted with the semiconductor device to which an embodiment ofthe present invention is applied will be described with reference toFIGS. 19A1, 19A2, and 19B. FIGS. 19A1 and 19A2 are each a top view of apanel in which highly reliable thin film transistors 4010 and 4011 eachhaving an IGZO semiconductor layer and a buffer layer having n-typeconductivity, and a liquid crystal element 4013 are sealed between afirst substrate 4001 and a second substrate 4006 with a sealant 4005.FIG. 19B is a cross-sectional view taken along a line M-N in FIGS. 19A1and 19A2.

The sealant 4005 is provided so as to surround a pixel portion 4002 anda scan line driver circuit 4004 which are provided over the firstsubstrate 4001. The second substrate 4006 is provided over the pixelportion 4002 and the scan line driver circuit 4004. Therefore, the pixelportion 4002 and the scan line driver circuit 4004 are sealed togetherwith a liquid crystal layer 4008, by the first substrate 4001, thesealant 4005, and the second substrate 4006. A signal line drivercircuit 4003 that is formed using a single crystal semiconductor film ora polycrystalline semiconductor film over a substrate separatelyprepared is mounted in a region that is different from the regionsurrounded by the sealant 4005 over the first substrate 4001.

Note that the connection method of a driver circuit which is separatelyformed is not particularly limited, and a COG method, a wire bondingmethod, a TAB method, or the like can be used. FIG. 19A1 illustrates anexample of mounting the signal line driver circuit 4003 by a COG method,and FIG. 19A2 illustrates an example of mounting the signal line drivercircuit 4003 by a TAB method.

The pixel portion 4002 and the scan line driver circuit 4004 which areprovided over the first substrate 4001 include a plurality of thin filmtransistors. FIG. 19B illustrates the thin film transistor 4010 includedin the pixel portion 4002 and the thin film transistor 4011 included inthe scan line driver circuit 4004.

Each of the thin film transistors 4010 and 4011 corresponds to a thinfilm transistor including an IGZO semiconductor layer and a buffer layerhaving n-type conductivity, and the thin film transistors described inany one of Embodiments 1, 2, and 3 can be used as the thin filmtransistors 4010 and 4011. In this embodiment, the thin film transistors4010 and 4011 are n-channel thin film transistors.

A pixel electrode layer 4030 included in the liquid crystal element 4013is electrically connected to the thin film transistor 4010. A counterelectrode layer 4031 of the liquid crystal element 4013 is formed on thesecond substrate 4006. A portion where the pixel electrode layer 4030,the counter electrode layer 4031, and the liquid crystal layer 4008overlap with one another corresponds to the liquid crystal element 4013.Note that the pixel electrode layer 4030 and the counter electrode layer4031 are provided with an insulating layer 4032 and an insulating layer4033 respectively which each function as an alignment film, and sandwichthe liquid crystal layer 4008 with the insulating layers 4032 and 4033interposed between the pixel electrode layer 4030 and the counterelectrode layer 4031.

Note that the first substrate 4001 and the second substrate 4006 can beformed by using glass, metal (typically, stainless steel), ceramic, orplastic. As plastic, a fiberglass-reinforced plastics (FRP) plate, apolyvinyl fluoride (PVF) film, a polyester film, or an acrylic resinfilm can be used. Alternatively, a sheet with a structure in which analuminum foil is sandwiched between PVF films or polyester films may beused.

Reference numeral 4035 denotes a columnar spacer obtained by selectivelyetching an insulating film and is provided to control the distancebetween the pixel electrode layer 4030 and the counter electrode layer4031 (a cell gap). Further, a spherical spacer may alternatively beused.

Further, a variety of signals and a potential are supplied to the signalline driver circuit 4003 which is formed separately, the scan linedriver circuit 4004, or the pixel portion 4002 from an FPC 4018.

In this embodiment, a connection terminal 4015 is formed using the sameconductive film as that of the pixel electrode layer 4030 included inthe liquid crystal element 4013, and a wiring 4016 is formed using thesame conductive film as that of gate electrode layers of the thin filmtransistors 4010 and 4011.

The connection terminal 4015 is electrically connected to a terminalincluded in the FPC 4018 through an anisotropic conductive film 4019.

Further, FIGS. 19A1, 19A2, and 19B illustrate an example in which thesignal line driver circuit 4003 is formed separately and mounted on thefirst substrate 4001; however, this embodiment is not limited to thisstructure. The scan line driver circuit may be separately formed andthen mounted, or only part of the signal line driver circuit or part ofthe scan line driver circuit may be separately formed and then mounted.

FIG. 20 illustrates an example in which a liquid crystal display moduleis formed as a semiconductor device by using a TFT substrate 2600manufactured by application of an embodiment of the present invention.

FIG. 20 illustrates an example of a liquid crystal display module, inwhich the TFT substrate 2600 and a counter substrate 2601 are fixed toeach other with a sealant 2602, and a pixel portion 2603 including a TFTor the like, a display element 2604 including a liquid crystal layer,and a coloring layer 2605 are provided between the substrates to form adisplay region. The coloring layer 2605 is necessary to perform colordisplay. In the case of the RGB system, respective coloring layerscorresponding to colors of red, green, and blue are provided forrespective pixels. Polarizing plates 2606 and 2607 and a diffusion plate2613 are provided outside the TFT substrate 2600 and the countersubstrate 2601. A light source includes a cold cathode tube 2610 and areflective plate 2611, and a circuit substrate 2612 is connected to awiring circuit portion 2608 of the TFT substrate 2600 through a flexiblewiring board 2609 and includes an external circuit such as a controlcircuit or a power source circuit. The polarizing plate and the liquidcrystal layer may be stacked with a retardation plate interposedtherebetween.

For the liquid crystal display module, a TN (twisted nematic) mode, anIPS (in-plane-switching) mode, an FFS (fringe field switching) mode, anMVA (multi-domain vertical alignment) mode, a PVA (patterned verticalalignment) mode, an ASM (axially symmetric aligned micro-cell) mode, anOCB (optical compensated birefringence) mode, an FLC (ferroelectricliquid crystal) mode, an AFLC (antiferroelectric liquid crystal) mode,or the like can be used.

Through the above process, a highly reliable display panel as asemiconductor device can be manufactured.

This embodiment can be implemented by being combined with any of thestructures described in other embodiments, as appropriate.

Embodiment 10

A semiconductor device according to an embodiment of the presentinvention can be applied to a variety of electronic appliances(including an amusement machine). Examples of electronic appliances area television set (also referred to as a television or a televisionreceiver), a monitor of a computer or the like, electronic paper, acamera such as a digital camera or a digital video camera, a digitalphoto frame, a mobile phone handset (also referred to as a mobile phoneor a mobile phone device), a portable game console, a portableinformation terminal, an audio reproducing device, a large-sized gamemachine such as a pachinko machine, and the like. In particular, aliquid crystal display device, a light-emitting device, anelectrophoretic display device, or the like to which a thin filmtransistor according to an embodiment of the present invention isapplied as described in Embodiments 6 to 9 can be used for a displayportion of an electronic appliance. Specific examples will be describedbelow.

A semiconductor device to which an embodiment of the present inventionis applied can be applied to electronic paper as described in Embodiment7. Electronic paper can be used for electronic appliances of a varietyof fields as long as they can display data. For example, electronicpaper can be applied to an electronic book reader (e-book reader), aposter, a transportation advertisement in a vehicle such as a train,displays of various cards such as a credit card, and the like. Examplesof the electronic appliances are illustrated in FIGS. 21A and 21B, andFIG. 22.

FIG. 21A illustrates a poster 1601 formed using electronic paper. In thecase where an advertising medium is printed paper, the advertisement isreplaced by manpower; however, by using electronic paper mounted with asemiconductor device to which an embodiment of the present invention isapplied, the advertising display can be changed in a short time.Further, since a thin film transistor having excellent electriccharacteristics is used, an image can be stably displayed without beingdistorted. Note that the poster may transmit and receive datawirelessly.

FIG. 21B illustrates an advertisement 1602 in a vehicle such as a train.In the case where an advertising medium is printed paper, theadvertisement is replaced by manpower; however, by using electronicpaper mounted with a semiconductor device to which an embodiment of thepresent invention is applied, the advertising display can be changed ina short time without a lot of manpower. Further, since a thin filmtransistor having excellent electric characteristics is used, an imagecan be stably displayed without being distorted. Note that theadvertisement may transmit and receive data wirelessly.

FIG. 22 illustrates an example of an electronic book reader 2700. Forexample, the electronic book reader 2700 includes two housings, ahousing 2701 and a housing 2703. The housing 2701 and the housing 2703are combined with a hinge 2711 so that the electronic book reader 2700can be opened and closed with the hinge 2711 as an axis. With such astructure, the electronic book reader 2700 can be operated like a paperbook.

A display portion 2705 and a display portion 2707 are incorporated inthe housing 2701 and the housing 2703, respectively. The display portion2705 and the display portion 2707 may display one image or differentimages. In the case where the display portion 2705 and the displayportion 2707 display different images, for example, a display portion onthe right side (the display portion 2705 in FIG. 22) can display textand a display portion on the left side (the display portion 2707 in FIG.22) can display graphics.

FIG. 22 illustrates an example in which the housing 2701 is providedwith an operation portion and the like. For example, the housing 2701 isprovided with a power switch 2721, an operation key 2723, a speaker2725, and the like. With the operation key 2723, pages can be turned.Note that a keyboard, a pointing device, and the like may be provided onthe surface of the housing, on which the display portion is provided.Further, an external connection terminal (an earphone terminal, a USBterminal, a terminal that can be connected to various cables such as anAC adapter and a USB cable, or the like), a recording medium insertionportion, and the like may be provided on the back surface or the sidesurface of the housing. Further, the electronic book reader 2700 mayhave a function of an electronic dictionary.

The electronic book reader 2700 may transmit and receive datawirelessly. The structure may be employed in which a desired book dataor the like is purchased and downloaded from an electronic book serverwirelessly.

FIG. 23A illustrates an example of a television set 9600. In thetelevision set 9600, a display portion 9603 is incorporated in a housing9601. The display portion 9603 can display an image. Further, thehousing 9601 is supported by a stand 9605 here. Any of the displaydevices described in Embodiments 6 to 9 can be applied to the displayportion 9603.

The television set 9600 can be operated by an operation switch of thehousing 9601 or a separate remote controller 9610. Channels and volumecan be controlled by an operation key 9609 of the remote controller 9610so that an image displayed on the display portion 9603 can becontrolled. Further, the remote controller 9610 may be provided with adisplay portion 9607 for displaying data output from the remotecontroller 9610.

Note that the television set 9600 is provided with a receiver, a modem,and the like. With the receiver, a general television broadcast can bereceived. Further, when the television set 9600 is connected to acommunication network by wired or wireless connection via the modem,one-way (from a transmitter to a receiver) or two-way (between atransmitter and a receiver or between receivers) data communication canbe performed.

FIG. 23B illustrates an example of a digital photo frame 9700. Forexample, in the digital photo frame 9700, a display portion 9703 isincorporated in a housing 9701. The display portion 9703 can displayvarious images. For example, the display portion 9703 can display dataof an image shot by a digital camera or the like to function as a normalphoto frame.

Note that the digital photo frame 9700 is provided with an operationportion, an external connection portion (a USB terminal, a terminal thatcan be connected to various cables such as a USB cable, or the like), arecording medium insertion portion, and the like. Although they may beprovided on the surface on which the display portion is provided, it ispreferable to provide them on the side surface or the back surface forthe design of the digital photo frame 9700. For example, a memorystoring data of an image shot by a digital camera is inserted in therecording medium insertion portion of the digital photo frame, wherebythe image data can be transferred and displayed on the display portion9703.

The digital photo frame 9700 may transmit and receive data wirelessly.The structure may be employed in which desired image data is transferredwirelessly to be displayed.

FIG. 24 illustrates an example of a digital player 2100 that is aportable audio device. The digital player 2100 includes a housing 2130,a display portion 2131, a memory portion 2132, an operation portion2133, earphones 2134, a control portion 2137, and the like. Note thatheadphones or wireless earphones may be used instead of the earphones2134. Any of the display devices described in Embodiments 6 to 9 can beapplied to the display portion 2131.

Further, images and sounds (music) can be recorded and reproduced withthe use of the memory portion 2132 by operating the operation portion2133. Note that power consumption of the display portion 2131 can besuppressed through display of white text on black background. Note thata memory provided in the memory portion 2132 may be removable.

FIG. 25 illustrates an example of a mobile phone handset 1000. Themobile phone handset 1000 is provided with a display portion 1002incorporated in a housing 1001, an operation button 1003, an externalconnection port 1004, a speaker 1005, a microphone 1006, and the like.The display device described in Embodiment 8 or 9 can be applied to thedisplay portion 1002.

When the display portion 1002 of the mobile phone handset 1000illustrated in FIG. 25 is touched with a finger or the like, data can beinput into the mobile phone handset 1000. Further, operations such asmaking calls and composing mails can be performed by touching thedisplay portion 1002 with a finger or the like.

There are mainly three screen modes of the display portion 1002. Thefirst mode is a display mode mainly for displaying an image. The secondmode is an input mode mainly for inputting data such as text. The thirdmode is a display-and-input mode in which two modes of the display modeand the input mode are combined.

For example, in the case of making a call or composing a mail, a textinput mode mainly for inputting text is selected for the display portion1002 so that text displayed on a screen can be inputted. In that case,it is preferable to display a keyboard or number buttons on almost allarea of the screen of the display portion 1002.

When a detection device including a sensor for detecting inclination,such as a gyroscope or an acceleration sensor, is provided inside themobile phone handset 1000, display in the screen of the display portion1002 can be automatically switched by determining the direction of themobile phone handset 1000 whether the mobile phone handset 1000 isplaced horizontally or vertically for a landscape mode or a portraitmode (whether the mobile phone handset 1000 stands upright or is laiddown on its side).

The screen modes are switched by touching the display portion 1002 oroperating the operation button 1003 of the housing 1001. Alternatively,the screen modes may be switched depending on the kind of the imagedisplayed on the display portion 1002. For example, when a signal of animage displayed on the display portion is the one of moving image data,the screen mode is switched to the display mode. When the signal is theone of text data, the screen mode is switched to the input mode.

Further, in the input mode, when input by touching the display portion1002 is not performed for a certain period while a signal detected bythe optical sensor in the display portion 1002 is detected, the screenmode may be controlled so as to be switched from the input mode to thedisplay mode.

The display portion 1002 may function as an image sensor. For example,an image of the palm print, the fingerprint, or the like is taken bytouching the display portion 1002 with the palm or the finger, wherebypersonal authentication can be performed. Further, by providing abacklight or sensing light source emitting a near-infrared light for thedisplay portion, an image of a finger vein, a palm vein, or the like canbe taken.

This embodiment can be combined with any of the structures described inthe other embodiments as appropriate.

This application is based on Japanese Patent Application serial no.2008-206006 filed with Japan Patent Office on Aug. 8, 2008, the entirecontents of which are hereby incorporated by reference.

1. (canceled)
 2. A semiconductor device comprising: a gate electrode; afirst gate insulating layer over the gate electrode, the first gateinsulating layer including silicon and nitrogen; a second gateinsulating layer over the first gate insulating layer, the second gateinsulating layer including silicon and oxygen; an oxide semiconductorlayer over and in direct contact with the second gate insulating layer,the oxide semiconductor layer comprising indium, gallium and zinc; aninsulating layer over a channel formation region of the oxidesemiconductor layer, the insulating layer including silicon and oxygen;a first conductive layer over the oxide semiconductor layer; a secondconductive layer over the oxide semiconductor layer; a first oxidebetween the oxide semiconductor layer and the first conductive layer,the first oxide including titanium; and a second oxide between the oxidesemiconductor layer and the second conductive layer, the second oxideincluding titanium, wherein the oxide semiconductor layer includes afirst region and a second region, wherein the first region is in contactwith the insulating layer, wherein a thickness of the second region issmaller than a thickness of the first region, wherein a length of thefirst oxide in a channel length direction of the oxide semiconductorlayer is larger than a length of the first conductive layer in thechannel length direction of the oxide semiconductor layer, and wherein alength of the second oxide in the channel length direction of the oxidesemiconductor layer is larger than a length of the second conductivelayer in the channel length direction of the oxide semiconductor layer.3. The semiconductor device according to claim 2, wherein the gateelectrode includes aluminum, chromium, titanium, tantalum, molybdenum,or copper.
 4. The semiconductor device according to claim 2, wherein theoxide semiconductor layer is formed by using a target obtained by mixingindium oxide, gallium oxide, and zinc oxide and performing sintering ofthe mixture of indium oxide, gallium oxide, and zinc oxide.
 5. Thesemiconductor device according to claim 2, wherein each of the firstoxide and the second oxide has n-type conductivity.
 6. The semiconductordevice according to claim 2, wherein the insulating layer overlaps thegate electrode, wherein the insulating layer does not overlap a regionof the oxide semiconductor layer, and wherein the region of the oxidesemiconductor layer does not overlap the gate electrode.
 7. Thesemiconductor device according to claim 2, wherein the second gateinsulating layer contains excessive oxygen.
 8. The semiconductor deviceaccording to claim 2, wherein the oxide semiconductor layer containsexcessive oxygen.
 9. A semiconductor device comprising: a gateelectrode; a first gate insulating layer over the gate electrode, thefirst gate insulating layer including silicon and nitrogen; a secondgate insulating layer over the first gate insulating layer, the secondgate insulating layer including silicon and oxygen; an oxidesemiconductor layer over and in direct contact with the second gateinsulating layer, the oxide semiconductor layer comprising indium,gallium and zinc; an insulating layer over a channel formation region ofthe oxide semiconductor layer, the insulating layer including siliconand oxygen; a first conductive layer over the oxide semiconductor layer;a second conductive layer over the oxide semiconductor layer; a firstoxide between the oxide semiconductor layer and the first conductivelayer, the first oxide including titanium; and a second oxide betweenthe oxide semiconductor layer and the second conductive layer, thesecond oxide including titanium, wherein the oxide semiconductor layerincludes a first region and a second region, wherein the first region isin contact with the insulating layer, wherein a thickness of the secondregion is smaller than a thickness of the first region, wherein the gateelectrode has a light-shielding property, wherein a length of the firstoxide in a channel length direction of the oxide semiconductor layer islarger than a length of the first conductive layer in the channel lengthdirection of the oxide semiconductor layer, and wherein a length of thesecond oxide in the channel length direction of the oxide semiconductorlayer is larger than a length of the second conductive layer in thechannel length direction of the oxide semiconductor layer.
 10. Thesemiconductor device according to claim 9, wherein the gate electrodeincludes aluminum, chromium, titanium, tantalum, molybdenum, or copper.11. The semiconductor device according to claim 9, wherein the oxidesemiconductor layer is formed by using a target obtained by mixingindium oxide, gallium oxide, and zinc oxide and performing sintering ofthe mixture of indium oxide, gallium oxide, and zinc oxide.
 12. Thesemiconductor device according to claim 9, wherein each of the firstoxide and the second oxide has n-type conductivity.
 13. Thesemiconductor device according to claim 9, wherein the insulating layeroverlaps the gate electrode, wherein the insulating layer does notoverlap a region of the oxide semiconductor layer, and wherein theregion of the oxide semiconductor layer does not overlap the gateelectrode.
 14. The semiconductor device according to claim 9, whereinthe second gate insulating layer contains excessive oxygen.
 15. Thesemiconductor device according to claim 9, wherein the oxidesemiconductor layer contains excessive oxygen.
 16. A semiconductordevice comprising: a gate electrode; a first gate insulating layer overthe gate electrode, the first gate insulating layer including siliconand nitrogen; a second gate insulating layer over the first gateinsulating layer, the second gate insulating layer including silicon andoxygen; an oxide semiconductor layer over and in direct contact with thesecond gate insulating layer, the oxide semiconductor layer comprisingindium, gallium and zinc; an insulating layer over a channel formationregion of the oxide semiconductor layer, the insulating layer includingsilicon and oxygen; a first conductive layer over the oxidesemiconductor layer; a second conductive layer over the oxidesemiconductor layer; a first oxide between the oxide semiconductor layerand the first conductive layer, the first oxide including titanium; anda second oxide between the oxide semiconductor layer and the secondconductive layer, the second oxide including titanium, wherein the oxidesemiconductor layer includes a first region and a second region, whereinthe first region is in contact with the insulating layer, wherein athickness of the second region is smaller than a thickness of the firstregion, wherein the gate electrode has a light-shielding property,wherein each of the first gate insulating layer and the second gateinsulating layer has a light-transmitting property, wherein a length ofthe first oxide in a channel length direction of the oxide semiconductorlayer is larger than a length of the first conductive layer in thechannel length direction of the oxide semiconductor layer, and wherein alength of the second oxide in the channel length direction of the oxidesemiconductor layer is larger than a length of the second conductivelayer in the channel length direction of the oxide semiconductor layer.17. The semiconductor device according to claim 16, wherein the gateelectrode includes aluminum, chromium, titanium, tantalum, molybdenum,or copper.
 18. The semiconductor device according to claim 16, whereinthe oxide semiconductor layer is formed by using a target obtained bymixing indium oxide, gallium oxide, and zinc oxide and performingsintering of the mixture of indium oxide, gallium oxide, and zinc oxide.19. The semiconductor device according to claim 16, wherein each of thefirst oxide and the second oxide has n-type conductivity.
 20. Thesemiconductor device according to claim 16, wherein the insulating layeroverlaps the gate electrode, wherein the insulating layer does notoverlap a region of the oxide semiconductor layer, and wherein theregion of the oxide semiconductor layer does not overlap the gateelectrode.
 21. The semiconductor device according to claim 16, whereinthe second gate insulating layer contains excessive oxygen.
 22. Thesemiconductor device according to claim 16, wherein the oxidesemiconductor layer contains excessive oxygen.